Substrate transfer robot assemblies, substrate processing systems, methods of making substrate processing systems, and methods of transferring substrates in substrate processing systems

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Solution Overview

Problem

Conventional substrate transfer robot assemblies are limited by the correspondence between the number of end effectors and processing module chambers, leading to increased movement requirements and reduced throughput in semiconductor processing systems.

Innovation Solution

A substrate transfer robot assembly with a tower, a first arm supporting a single end effector and a second arm supporting two end effectors, allowing for simultaneous transfer of multiple substrates between different types of processing modules, including single, dual, and quad chamber modules.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If the number of end effectors corresponds to the number of processing module chambers, then the robot structure is simplified, but the substrate transfer throughput is reduced and movement requirements increase

Engineering Contradiction:

Improverobot structureVSAvoidsubstrate transfer throughput

Core Design Contradiction:

Device complexityVSProductivity

Solution Approach 1:

The patent combines multiple end effectors (second and third end effectors) onto a single second arm, allowing the robot to hold and transfer multiple substrates simultaneously. This merging approach increases substrate transfer throughput without proportionally increasing the number of arms, thus resolving the contradiction between device complexity and productivity.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The second arm is designed to perform multiple functions by supporting both the second end effector and the third end effector, enabling it to transfer substrates to multiple different chambers (e.g., first chamber and second chamber) in a single operation cycle. This multi-functionality increases throughput while maintaining relatively simple robot structure.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Device complexity

If a single end effector is used in dual chamber or quad chamber modules, then the robot structure is simplified, but the number of movements required increases

Engineering Contradiction:

Improverobot structureVSAvoidnumber of movements

Core Design Contradiction:

Device complexityVSLoss of time

Solution Approach 1:

By merging the second and third end effectors onto the same second arm, the system can perform multiple substrate transfers in parallel. Instead of requiring sequential movements with a single end effector, the robot can simultaneously transfer substrates to different chambers, reducing the total number of movements and time loss.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The dual end effector configuration on the second arm enables continuous substrate transfer operations by allowing one end effector to transfer to one chamber while the other end effector transfers to another chamber simultaneously, eliminating idle movement time and maintaining continuous productive action.

Inventive Principle:

Principle #20Continuity of useful action

3Productivity

If multiple end effectors are added to increase throughput, then substrate transfer efficiency improves, but device complexity increases

Engineering Contradiction:

Improvesubstrate transfer throughputVSAvoidrobot structure

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

Instead of adding separate arms for each end effector, the patent merges multiple end effectors onto the second arm. This approach increases substrate transfer throughput by enabling simultaneous transfers while minimizing the increase in device complexity by sharing the arm structure and control system.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The second arm is designed as a universal carrier that can support multiple end effectors and perform multiple transfer functions. This multi-functional design increases productivity without requiring proportionally more arms or complex control systems, thus limiting the increase in device complexity.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Data Source

PatentUS20260040888A1Substrate transfer robot assemblies, substrate processing systems, methods of making substrate processing systems, and methods of transferring substrates in substrate processing systems

Publication Date: 2026.02.05 ASM IP HLDG BV

AI summary

A substrate transfer robot assembly includes a tower, a first arm with a first end effector, and a second arm with a second end effector and a third end effector. The tower defines a tower axis, the first arm and the second arm extend radially outward from the tower, the first end effector is coupled to the tower by the first arm, and the second end effector and a third end effector are coupled to the tower by the second arm. The first end effector is supported by the first arm for translation from the tower radially relative to the tower axis, and the second end effector and the third end effector are supported by the second arm for translation from the tower radially relative to the tower axis. Substrate processing systems, methods of making substrate processing systems, and substrate transfer methods are also described.