Substrate Transfer Robot Feedback Control for Precise Susceptor Centering
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Solution Overview
Problem
Existing substrate transfer methods in semiconductor fabrication require manual setting of reference values for substrate positioning, which is error-prone and needs re-adjustment due to environmental changes, such as transitioning between atmospheric and vacuum states, affecting the accuracy of substrate placement on susceptors.
Innovation Solution
A substrate transfer method and apparatus that automatically corrects reference values using a substrate position sensing unit to ensure accurate substrate centering on susceptors, adapting to changes in environmental conditions and hardware modifications without manual intervention.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual setting of reference values is used for substrate positioning, then the system is simple to operate, but the positioning accuracy deteriorates due to operator skill level and environmental changes
Solution Approach 1:
The substrate transfer robot automatically adjusts its reference values by detecting the actual position of the substrate seating unit and calculating correction values, eliminating the need for manual operator intervention and ensuring consistent positioning accuracy regardless of operator skill level
Solution Approach 2:
The system detects the actual position of the substrate seating unit, compares it with the reference position, calculates a correction value, and applies it to update the reference values for subsequent transfers, creating a closed-loop feedback system that maintains positioning accuracy under varying environmental conditions
2Measurement precision
If reference values are re-adjusted due to environmental changes, then positioning accuracy is maintained, but the process time increases
Solution Approach 1:
The system performs reference value adjustment automatically during the substrate transfer process itself, rather than requiring separate calibration steps, by detecting the substrate seating unit position and updating reference values in real-time, thus maintaining positioning accuracy without adding process time
Solution Approach 2:
The substrate transfer robot autonomously performs reference value correction by detecting positional deviations and calculating appropriate correction values, eliminating the need for manual re-adjustment operations and maintaining continuous positioning accuracy without time loss
3Measurement precision
If automatic reference value correction is implemented, then positioning accuracy is maintained without manual intervention, but the device complexity increases
Solution Approach 1:
The system replaces manual mechanical adjustment operations with an automatic electronic control system that detects substrate seating unit position, calculates correction values, and updates reference values programmatically, maintaining positioning accuracy while reducing operational complexity
Solution Approach 2:
The substrate transfer robot automatically performs reference value correction using its own detection and control systems, eliminating the need for external manual intervention and complex manual adjustment mechanisms, thus maintaining accuracy with minimal added system complexity
Data Source
AI summary
The present disclosure relates to a substrate transfer method and apparatus which controls a substrate transfer robot using position information of a substrate, when the substrate is loaded or unloaded in the substrate transfer apparatus including the substrate transfer robot. When an operation of setting a new reference value due to a change in process or hardware after setting the initial reference value for loading or unloading the substrate is requested, the substrate transfer method and apparatus can automatically perform the reference value setting operation. Therefore, the substrate transfer method and apparatus can transfer the substrate such that the substrate is located in the center of the susceptor, even though the reference value of the substrate transfer robot is not manually changed.