Substrate Transfer Robot Layout Control for Faster Semiconductor Setup
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Solution Overview
Problem
The existing substrate processing apparatuses require significant manual effort from operating personnel to set up transfer operation information for transfer robots, which is time-consuming and prone to errors, especially during initial installation and when configuring multiple process modules.
Innovation Solution
A substrate processing apparatus with a controller that stores and utilizes layout information to autonomously control the operations of first and second transfer robots, reducing the burden on personnel by automatically determining the transfer operations based on pre-stored information for different arrangements of chambers and process modules.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If manual setting operation is performed for transfer robot configuration, then the system can be set up according to specific arrangement requirements, but the burden on operating personnel increases and setup time is extended
Solution Approach 1:
The controller pre-stores multiple types of layout information corresponding to different chamber arrangements before operation. When setup is needed, the controller automatically selects and applies the appropriate pre-stored layout information, eliminating the need for manual configuration and reducing personnel burden while maintaining arrangement adaptability.
Solution Approach 2:
The system uses pre-stored layout information as templates or copies of common arrangements. Instead of manually creating new configurations, the controller selects from existing copied layouts, which reduces setup time and operational burden while still providing adaptability through multiple pre-defined layout options.
2Adaptability or versatility
If manual setting operation is performed for transfer robot configuration, then specific arrangement requirements can be met, but setup time is extended
Solution Approach 1:
Multiple layout information types are prepared and stored in advance in the controller. During setup, the controller automatically retrieves the appropriate pre-stored layout information based on the required arrangement, significantly reducing setup time while maintaining the ability to accommodate different arrangement configurations.
Solution Approach 2:
The controller autonomously performs the layout configuration task by automatically selecting and applying the appropriate pre-stored layout information without requiring manual intervention. This self-service capability reduces both setup time and personnel burden while maintaining arrangement adaptability.
3Adaptability or versatility
If multiple layout information types are stored in the controller, then arrangement adaptability is improved, but device complexity increases
Solution Approach 1:
The controller stores multiple types of layout information as data templates representing different chamber arrangements. These are informational copies rather than physical components, allowing multiple arrangement configurations to be stored with minimal additional hardware complexity. The layout information can be selected and applied based on the specific installation requirements.
Data Source
AI summary
To reduce a burden on an operating personnel in setting transfer operation information of a transfer robot configured to transfer a substrate, there is provided a technique that includes: a placement chamber for placing a container accommodating a substrate; a first transfer chamber including a first transfer robot; process modules for processing the substrate; a second transfer chamber including a second transfer robot; a memory storing a plurality of pieces of layout information indicating arrangements of the placement chamber, the first transfer chamber, the second transfer chamber and the process modules; and a controller for controlling operations of the first transfer robot and the second transfer robot based on at least one of the plurality of pieces of layout information in the memory.