Substrate Transfer Robot Link Calibration for Thermal Expansion
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Solution Overview
Problem
Existing substrate transfer robot systems face challenges in achieving precise placement of substrates due to variations in link lengths caused by thermal expansion and non-uniform temperature distribution, which affect the accuracy of substrate positioning in semiconductor manufacturing processes.
Innovation Solution
A substrate transfer robot system that calculates the length of each link based on the robot's position in different postures using a calculator and a controller to control the robot for accurate placement, compensating for thermal expansion and temperature variations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the robot uses fixed link lengths for substrate transfer, then the robot structure is simple and easy to manufacture, but the placement accuracy deteriorates due to thermal expansion and temperature variations
Solution Approach 1:
The system performs preliminary measurement of hand link positions in multiple predetermined postures before substrate transfer. The calculator computes actual link lengths based on these pre-measured positions, allowing the control unit to compensate for thermal expansion effects during actual substrate placement operations without adding physical complexity to the robot structure
Solution Approach 2:
The patent replaces physical thermal compensation mechanisms with a computational approach. Instead of using mechanical adjustments or thermal control hardware, the system substitutes link length parameters with computationally determined values based on measured hand positions, achieving accuracy improvement through information processing rather than mechanical means
2Measurement precision
If the robot measures link lengths in multiple postures to compensate for thermal expansion, then the placement accuracy is improved, but the measurement and calculation complexity increases
Solution Approach 1:
The system utilizes dynamic measurement approach by measuring hand link positions in multiple predetermined postures rather than relying on a single static measurement. This dynamic multi-posture measurement strategy enables accurate computation of link lengths that account for thermal expansion, transforming a complex measurement problem into a series of simpler positional measurements across different configurations
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Improves the accuracy of substrate placement by reliably calculating link lengths and adjusting robot movements, ensuring precise positioning despite thermal expansion and temperature fluctuations.
Implementation Method 1
variations in link lengths caused by thermal expansion and non-uniform temperature distribution
Data Source
AI summary
A substrate transfer robot system includes: a robot provided with a hand link including a hand supporting a substrate, and a plurality of links including one or more links connected to the hand link; a calculator that calculates a length of each of the plurality of links of the robot based on a position of the hand link in a state where the robot is in a first posture and a position of the hand link in a state where the robot is in a second posture different from the first posture; and a controller that controls the robot to place the substrate at a target position based on the length of each of the plurality of links calculated by the calculator.