Substrate Transfer Robot Sensing for Wafer Misalignment Detection
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Solution Overview
Problem
Substrate misalignment during transfer between reaction chambers in substrate processing apparatuses leads to processing errors, necessitating a detection mechanism to prevent such misalignment.
Innovation Solution
Incorporation of a substrate transfer robot with a rotation arm, motor, motor controller, capacitive sensors, and photoelectric sensors to detect misalignment and automatically stop the motor when misalignment is detected, ensuring precise substrate positioning on susceptors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If substrate transfer is performed manually or without alignment detection, then device complexity is reduced, but manufacturing precision deteriorates due to substrate misalignment
Solution Approach 1:
The patent replaces complex mechanical alignment mechanisms with optical detection systems (sensors) that use light to detect substrate position and generate alignment signals, thereby achieving high precision without complex mechanical structures
Solution Approach 2:
The patent introduces sensors as intermediary devices between the substrate transfer robot and the control system, which detect substrate position and convert it into alignment signals that guide the robot for precise positioning
2Manufacturing precision
If alignment detection sensors are added to the substrate transfer robot, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
The patent replaces complex mechanical alignment adjustment mechanisms with optical sensors that automatically detect substrate position and provide feedback signals, achieving precise positioning through detection rather than mechanical adjustment
Solution Approach 2:
The sensor system automatically detects substrate alignment status and generates correction signals without requiring external intervention, enabling the system to self-correct positioning errors during the transfer process
3Reliability
If real-time alignment detection is implemented, then reliability is improved by preventing processing errors, but device complexity increases due to additional sensors and control systems
Solution Approach 1:
The patent implements a feedback mechanism where sensors continuously monitor substrate alignment during transfer, and the control system uses this real-time information to adjust robot positioning, ensuring reliable error prevention through closed-loop control
Solution Approach 2:
The patent replaces complex mechanical interlocking and physical alignment enforcement mechanisms with optical detection and electronic control systems that prevent errors through information-based control rather than mechanical constraints
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents processing errors by accurately detecting and correcting substrate misalignment, enhancing the reliability and precision of film formation and modification processes.
Implementation Method 1
the capacitive sensor may be configured to generate an electrostatic field to the substrate on the susceptor when the motor rotates the rotation shaft
Implementation Method 2
a photoelectric sensor disposed between the center plate and the motor, wherein the photoelectric sensor is configured to detect a phase angle of the motor
Data Source
AI summary
A substrate processing apparatus is disclosed. Exemplary substrate processing apparatus includes a plurality of reaction chambers; a plurality of susceptors disposed within the reaction chambers and configured to support a substrate; a substrate transfer robot disposed within the substrate processing apparatus, comprising: a rotation arm comprising a plurality of arms, the arms configured to transfer the substrate between the reaction chambers; and a rotation shaft connected to the plurality of arms; a motor configured to rotate the rotation shaft; a motor controller configured to drive the motor; and a first sensor with a portion disposed on at least one of the plurality of arms.