Substrate-Conveying Robot Notch Detection During Continuous Transfer
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Solution Overview
Problem
Existing substrate-conveying robots require stopping conveyance to acquire positional information on notches or orientation flats, increasing conveyance time.
Innovation Solution
A substrate-conveying robot system with an image capturer positioned below the substrate-handling hand captures images to determine positional information on notches or orientation flats during conveyance, using sensors to detect the substrate's outline shape and notch presence without altering the conveyance path.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the substrate is stopped on the conveyance path to acquire positional information using an aligner, then the positional information on the notch or orientation flat can be detected, but the conveyance time increases
Solution Approach 1:
The patent changes the detection dimension by positioning the image capturer below the substrate conveyance path instead of requiring the substrate to stop at a separate aligner. This allows continuous capture of images during conveyance, eliminating the time loss while maintaining measurement precision through optical detection from a different spatial perspective
Solution Approach 2:
The patent implements continuous conveyance without interruption by capturing images during motion. The substrate-handling hand continuously moves the substrate along the conveyance path while the image capturer continuously captures images, allowing positional information acquisition without stopping the conveyance process
2Measurement precision
If an aligner is added to the conveyance path for detection, then positional information can be acquired, but the device complexity increases
Solution Approach 1:
The patent merges the detection function into the substrate-handling hand by integrating an image capturer directly onto it. This combination eliminates the need for a separate aligner device, reducing system complexity while maintaining the capability to acquire positional information on notches and orientation flats
Solution Approach 2:
The substrate-handling hand is given multiple functions: it both conveys the substrate and captures images for positional information detection. This multi-functionality eliminates the need for dedicated detection equipment, simplifying the overall system structure while maintaining measurement capabilities
3Ease of manufacture
If the image capturer is positioned above the substrate, then the structure is conventional, but the robot's height increases
Solution Approach 1:
The patent inverts the conventional arrangement by positioning the image capturer below the substrate instead of above it. This inversion allows the substrate-handling hand to have a compact structure with reduced height, while still achieving effective image capture for positional information detection
Data Source
AI summary
A substrate-conveying robot system includes the controller for acquiring positional information on a notch or an orientation flat in a substrate based on an image captured by an image capturer from a lower side with respect to a substrate-handling hand in conveyance of the substrate.