Substrate Transfer Robot Layout for Shorter Port Reach
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Solution Overview
Problem
The existing substrate transport systems face inefficiencies due to large intervals between the robot and the port, leading to increased movement distances and reduced transport operation efficiency.
Innovation Solution
A substrate transport system with a transfer robot that includes a main body unit, a turning support unit, an arm support unit, and an arm unit, where the arm unit is supported by the arm support unit and rotates relative to it, allowing for efficient substrate movement between placement portions while maintaining the substrate's orientation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the interval between the robot and the port is made large to ensure arm turning space, then the robot can turn its arm properly, but the movement distance of the substrate increases and transport efficiency decreases
Solution Approach 1:
The patent introduces a turning support unit that enables the arm support unit to rotate relative to the main body unit in addition to the arm unit's rotation. This multi-dimensional rotation capability allows the arm to achieve the necessary turning angle without requiring a large linear interval between the robot and the port, thus resolving the contradiction between arm turning space and transport efficiency
2Ease of operation
If the interval between the robot and the port is made large to ensure arm turning space, then the robot can turn its arm properly, but the port and placement portion sizes must be larger
Solution Approach 1:
By adding the turning support unit that enables rotation in another dimension, the patent reduces the linear space requirement in the original dimension. This allows the port and placement portion to be smaller while still providing sufficient arm turning space through the multi-axis rotation mechanism
Data Source
AI summary
A substrate transport system includes a transport section a first placement portion and a second placement portion, and a transfer robot, wherein the transfer robot includes a main body unit disposed inside a transfer section, a turning support unit connected to the main body unit, an arm support unit connected to the turning support unit, an arm unit connected to the arm support unit, and a holding unit connected to the arm unit, wherein the arm unit includes a first arm that is supported by the arm support unit and a second arm that supports the holding unit and is supported by the first arm, wherein the turning support unit rotates using a connection portion with the main body unit as a rotation shaft in a plan view, the arm support unit rotates using a connection portion with the turning support unit as a rotation shaft in a plan view.