Substrate Transfer Robot Hand Control for Secure High-Speed Retreat
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Solution Overview
Problem
Existing substrate transfer robots face challenges in preventing increased substrate transferring time and ensuring the substrate holding mechanism effectively holds the substrate during forward and rearward hand movements.
Innovation Solution
A substrate transfer robot with a hand equipped with a substrate holding mechanism, where the robot controller operates the mechanism and hand to release the substrate, advance to a new position, and then retreat while the substrate is held, controlling speeds to minimize failure risks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the hand is moved forward and rearward at high speed to reduce substrate transferring time, then productivity is improved, but the substrate holding mechanism may fail to hold the substrate
Solution Approach 1:
The substrate holding mechanism is activated before the hand reaches maximum speed during retreat, and remains active throughout the entire retreat motion. This preliminary engagement ensures the substrate is securely held before high-speed movement begins, preventing failure during transit while maintaining high productivity through optimized timing sequences.
2Reliability
If the substrate holding mechanism is activated during forward movement to hold the substrate, then substrate holding reliability is improved, but substrate transferring time increases
Solution Approach 1:
The substrate holding mechanism is engaged in advance during the retreat phase before the hand needs to reverse direction, rather than activating during forward movement. This timing optimization allows the substrate to be secured before speed changes occur, maintaining reliability while minimizing the time the mechanism is active and thus reducing overall transfer time.
Data Source
AI summary
A substrate transfer robot includes a robot body including a first hand having a first substrate placing part on which a substrate is placed and a first substrate holding mechanism configured to hold and release the substrate, and a robot controller. The robot controller controls a speed of the first hand such that an absolute value of a first maximum speed or an absolute value of a first maximum acceleration during a first period after the first hand starts retreating until the substrate is held by the first substrate holding mechanism is lower than an absolute value of a second maximum speed or an absolute value of a second acceleration during a second period after the substrate is held until the first hand ends retreating.