Multi-End-Effector Substrate Robot for Single-Cycle Wafer Transfer
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Solution Overview
Problem
Conventional electronic device manufacturing systems face inefficiencies in substrate transportation between process chambers and load locks, often requiring multiple trips of a robot arm, which limits productivity.
Innovation Solution
A robot apparatus with an arm configuration that includes multiple independently rotatable forearms and wrist members, equipped with multiple end effectors, allows for simultaneous retrieval and placement of substrates across multiple substrate supports in a single cycle, reducing the need for multiple trips.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a conventional robot arm is used for substrate transport, then the structure is simple, but the productivity is low due to multiple trips required
Solution Approach 1:
The patent combines multiple end effectors (first, second, third, and fourth end effectors) onto a single robot arm, enabling simultaneous substrate handling at multiple locations. This merging of functions allows the robot to perform multiple transport operations in one cycle, dramatically improving productivity without adding multiple separate robot arms
Solution Approach 2:
The robot arm is segmented into multiple independently controllable end effectors, each capable of performing substrate pickup and placement operations. This segmentation allows different portions of the robot arm to work on different substrates simultaneously, enabling parallel operations that increase throughput while maintaining a single arm structure
2Loss of time
If multiple trips are made for substrate transport, then the robot structure is simple, but the time consumption increases
Solution Approach 1:
The patent enables continuous useful action by configuring the robot arm with multiple end effectors that can simultaneously pick up substrates from different locations and place them at different destinations within the same chamber. This eliminates idle travel time between sequential operations, as the robot performs multiple transport tasks in parallel within a single continuous cycle
Solution Approach 2:
The robot arm is pre-configured with multiple end effectors positioned to access multiple substrate supports simultaneously. This preliminary arrangement allows the robot to execute multiple transport operations without repositioning the entire arm structure between tasks, reducing cycle time by eliminating repetitive setup and travel movements
Data Source
AI summary
Electronic device manufacturing systems, robot apparatus and associated methods are described. The robot apparatus includes an arm having an inboard end and an outboard end, the inboard end is configured to rotate about a shoulder axis; a first forearm is configured for independent rotation relative to the arm about an elbow axis at the outboard end of the arm; a first wrist member is configured for independent rotation relative the first forearm about a first wrist axis at a distal end of the first forearm opposite the elbow axis, wherein the first wrist member includes a first end effector and a second end effector. The robot apparatus further includes a second forearm configured for independent rotation relative to the arm about the elbow axis; a second wrist member configured for independent rotation relative the second forearm about a second wrist axis, wherein the second wrist member comprises a third end effector and a fourth end effector. The robot apparatus further includes a third forearm configured for independent rotation relative to the arm about the elbow axis; and a third wrist member configured for independent rotation relative the third forearm about a third wrist axis, wherein the third wrist member includes a fifth end effector and a sixth end effector.