Substrate Transfer Robot Layout for Compact Vacuum Transport
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Solution Overview
Problem
The existing substrate transport systems face inefficiencies due to the limited range of motion of transfer robots within vacuum chambers, leading to decreased transport efficiency and increased space requirements, particularly when ports are arranged in a way that requires longer arm movements and larger intervals, which can reduce operational efficiency.
Innovation Solution
A substrate transport system with a transfer robot that includes a main body unit, a turning support unit, an arm support unit, and an arm unit, where the arm units are independently rotatable and connected to maintain the substrate's orientation, allowing for efficient transport between placement portions arranged in a specific pattern within the transport section, optimizing arm movement and reducing the need for large port and placement portion sizes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the robot is positioned far from the port to ensure arm turning space, then the arm can rotate properly, but the motion distance of the arm becomes long and transport efficiency decreases
Solution Approach 1:
The patent transitions from a planar arm movement to a three-dimensional spherical movement by positioning the robot at the center of the chamber and allowing the arm to move in radial directions. This dimensional change enables the arm to reach ports at various positions without requiring excessive linear distance, thus improving transport efficiency while maintaining adequate turning space.
Solution Approach 2:
The patent employs a dynamically adjustable arm mechanism that can change its length and orientation. The arm length is adjustable between a first length (when the robot is far from the port) and a second length (when the robot is close to the port). This dynamic adjustment allows the arm to optimize its movement path, reducing motion distance while ensuring sufficient turning space when needed.
2Adaptability or versatility
If ports are arranged on opposite sides requiring larger second direction length, then all ports can be accessed, but the transport operation efficiency is reduced
Solution Approach 1:
The patent designs a universal arm mechanism that can service ports arranged in various configurations. By positioning the robot at the center and enabling spherical arm movement, a single robot configuration can access ports on opposite sides or at any intermediate position, eliminating the need for multiple specialized robots or complex reconfiguration, thus maintaining both adaptability and efficiency.
Solution Approach 2:
The patent implements a pre-positioning mechanism where the robot moves to an optimal position before arm extension. The robot first positions itself at a predetermined location within the chamber, then extends the arm to the required length for accessing specific ports. This preliminary positioning optimizes the subsequent arm movement, reducing overall transport time and maintaining efficiency even when accessing ports on opposite sides.
Data Source
AI summary
A substrate transport system includes a transport section that defines a range within which a substrate is transported, a first placement portion and a second placement portion on which the substrate is placed, and a transfer robot that is provided inside the transport section and transports the substrate from the first placement portion to the second placement portion, wherein the transfer robot includes a main body unit disposed within the transport section, a turning support unit that is connected to the main body unit, an arm support unit that is connected to the turning support unit, an arm unit that is connected to the arm support unit, and a holding unit that connected to the arm unit, wherein the turning support unit includes a first end portion that is rotatably connected to the main body unit, and a second end portion to which the arm support unit is rotatably connected.