Substrate Transfer Robot 3D Sensing for Warpage Alignment
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Solution Overview
Problem
Conventional substrate transfer robots face challenges in properly taking out and transferring substrates when they are misaligned or have shape changes, such as warpage, as they operate based on pre-taught information without considering three-dimensional information.
Innovation Solution
A horizontal articulated substrate transfer robot equipped with an arm, hand, camera, and motion controller that captures images from multiple viewpoints to calculate three-dimensional information, allowing precise alignment and extraction of substrates based on their actual position and shape.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Extent of automation
If a substrate transfer robot operates based on pre-taught information, then the operation is simple and automated, but the robot cannot properly take out substrates when they are misaligned or have shape changes
Solution Approach 1:
The patent implements a feedback mechanism where the camera captures images of the substrate, the calculator computes three-dimensional information from these images, and the motion controller adjusts the hand's movement based on this computed information. This closed-loop feedback system enables the robot to adapt to actual substrate positions and shapes, resolving the contradiction between automated operation and extraction accuracy.
Solution Approach 2:
The patent performs preliminary actions by capturing images of the substrate before extraction and computing its three-dimensional information in advance. This preliminary measurement and calculation allow the system to plan the extraction path and hand movement beforehand, ensuring accurate extraction even when substrates are misaligned or warped, while maintaining automated operation.
2Device complexity
If the robot uses pre-taught information for substrate extraction, then the control process is simple, but it fails to recognize actual substrate position and shape
Solution Approach 1:
The patent replaces the mechanical pre-taught control system with an optical measurement system. The camera captures images of the substrate, and the calculator computes three-dimensional information from these images, substituting the need for complex mechanical positioning and teaching processes with optical field-based measurement, thereby achieving precise position and shape recognition without significantly increasing control complexity.
Solution Approach 2:
The patent introduces an intermediary system consisting of the camera and calculator that mediates between the robot's mechanical arm and the substrate. Instead of direct mechanical interaction based on pre-taught information, the intermediary optical measurement system captures substrate information and translates it into control commands, enabling precise recognition while keeping the overall system relatively simple.
3Ease of operation
If the robot hand moves based on pre-taught information, then the motion control is straightforward, but it cannot adapt to substrate misalignment or warpage
Solution Approach 1:
The patent transforms the static pre-taught motion control into a dynamic adaptive system. The motion controller continuously receives real-time three-dimensional information from the camera and calculator, and adjusts the hand's movement trajectory accordingly. This dynamic adjustment enables the system to adapt to substrate misalignment and warpage while maintaining relatively simple motion control through automated real-time calculation and adjustment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables proper extraction and transfer of substrates by recognizing their three-dimensional information, ensuring accurate positioning and handling even when substrates are misaligned or warped.
Implementation Method 1
The camera is attached to the hand and captures images of the substrate placed at a take-out position from a plurality of viewpoints to acquire images of the substrate
Data Source
AI summary
A robot includes an arm, a hand, a camera, a calculation unit, and a motion controller. The hand is attached to the arm, and supports and transfers a substrate. The camera is attached to the hand and captures images of the substrate disposed at the take-out position from a plurality of viewpoints to acquire images of the substrate. The calculator calculates three-dimensional information of the substrate based on the hand acquired by the camera. The motion controller moves the hand to take out the substrate based on the three-dimensional information of the substrate calculated by the calculator.