Gas-Lifted Substrate Support for Rapid Rotation Braking
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in rapidly decelerating and stopping substrates after the acceleration gas supply is stopped, leading to prolonged processing times.
Innovation Solution
A substrate supporting assembly that includes a susceptor plate with substrate seats and gas flow lines for supplying lifting, acceleration, and deceleration gases, where the satellite is lifted, rotated, and decelerated using these gases to control the substrate's rotation speed and stop it quickly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If the substrate is rotated using acceleration gas supply, then the substrate rotation speed is improved, but the stopping time becomes excessively long
Solution Approach 1:
The patent applies preliminary anti-action by introducing a deceleration gas flow line that supplies gas in the opposite direction to substrate rotation before the substrate comes to a natural stop. This counter-directional gas flow creates a braking effect that actively opposes the rotation, significantly reducing the stopping time from a prolonged natural deceleration to a controlled rapid stop while maintaining the benefits of acceleration gas-driven rotation speed
2Manufacturing precision
If the satellite is lifted by lifting gas, then the substrate processing uniformity is improved, but the system complexity increases
Solution Approach 1:
The patent merges the lifting gas supply function into the existing satellite structure by integrating lifting gas flow lines that supply gas to the substrate seat, allowing the satellite to be lifted off the substrate seat during rotation. This combination achieves uniform substrate processing through satellite lifting while utilizing the existing mechanical structure, thereby reducing overall system complexity compared to separate lifting mechanisms
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables fast deceleration and stopping of substrates within a short time, reducing processing times and increasing productivity in semiconductor and solar cell manufacturing.
Implementation Method 1
a plurality of gas flow lines for supplying a lifting gas, an acceleration gas, and a deceleration gas to the substrate seat
Implementation Method 2
is rotated relative to the susceptor plate by the acceleration gas supplied in a forward direction of rotation
Implementation Method 3
is decelerated or stopped by the deceleration gas supplied in a reverse direction of rotation
Data Source
AI summary
A substrate supporting assembly includes a susceptor plate including at least one substrate seat, and a plurality of gas flow lines for supplying a lifting gas, an acceleration gas, and a deceleration gas to the substrate seat, and at least one satellite on the at least one substrate seat and including an upper surface, and a lower surface where a rotation pattern for receiving a rotational force and a braking force from the acceleration gas and the deceleration gas is provided. The at least one satellite is lifted from the at least one substrate seat by the lifting gas supplied from the at least one substrate seat, is rotated relative to the susceptor plate by the acceleration gas supplied in a forward direction of rotation, to rotate the substrate, and is decelerated or stopped by the deceleration gas supplied in a reverse direction of rotation.