Substrate Rotation Tension Adjustment for Thermal Stability
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Solution Overview
Problem
The tension of connection devices, such as belts, connecting multiple rotary modules in substrate processing apparatuses is not maintained due to temperature changes within the chamber, leading to positional changes of the rotary modules.
Innovation Solution
A substrate processing apparatus with a tension adjuster mechanism that includes a pivotal shaft, pivoting part, elastic part, and pulley system to adjust and maintain tension in the power transmitter connecting the drive shaft and rotating plate, ensuring stable rotation of substrates despite temperature fluctuations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a belt connects multiple rotary modules to rotate substrates simultaneously, then productivity is improved by processing multiple substrates at once, but the tension of the belt changes due to temperature variations causing positional shifts of rotary modules
Solution Approach 1:
The tension adjuster mechanism dynamically adapts the belt tension in response to temperature changes. The elastic part (spring) allows the tension to self-adjust as thermal expansion or contraction occurs, maintaining constant tension without requiring manual intervention or complex control systems. This dynamic adaptation resolves the contradiction by making the connection flexible yet stable.
Solution Approach 2:
The patent changes the physical parameter of belt tension through the tension adjuster mechanism. By incorporating an elastic component that responds to temperature-induced dimensional changes, the system automatically adjusts the tension parameter to compensate for thermal effects, thereby maintaining position stability while enabling multi-substrate processing.
2Adaptability or versatility
If the chamber temperature changes during substrate processing, then process flexibility is improved, but the tension of connection devices changes causing positional changes of rotary modules
Solution Approach 1:
The elastic part of the tension adjuster acts as a cushioning element that anticipates and compensates for tension changes before they cause positional errors. The spring pre-absorbs thermal expansion forces, preventing them from transmitting to the rotary modules and causing position inaccuracies during temperature variations.
Solution Approach 2:
The tension adjuster mechanism serves as an intermediary between the belt and the rotary modules. It mediates the thermal effects by absorbing and dampening tension variations, isolating the rotary modules from temperature-induced disturbances and maintaining their positional accuracy throughout the processing cycle.
3Manufacturing precision
If a rigid connection structure is used to connect rotary modules, then manufacturing precision is improved by maintaining fixed positions, but adaptability to temperature changes deteriorates causing tension changes and positional shifts
Solution Approach 1:
The patent employs a flexible belt connection instead of a rigid structure, combined with an elastic tension adjuster. This flexible connection can accommodate thermal expansion and contraction of the chamber components while maintaining sufficient tension to prevent slack and positional drift, thus achieving both position accuracy and thermal adaptability.
Solution Approach 2:
The connection system combines different material properties: the belt provides flexible power transmission, while the elastic part (spring) provides thermal compensation. This composite approach creates a connection system that simultaneously achieves rigidity for position accuracy and flexibility for thermal adaptability, resolving the contradiction between these opposing requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents changes in tension and maintains stable substrate rotation by automatically adjusting to temperature variations and positional shifts, preventing jamming and ensuring consistent substrate processing.
Implementation Method 1
an elastic part arranged to press against the one end of the pivoting part
Data Source
AI summary
Disclosed herein is a substrate processing apparatus including a process chamber having a processing space defined therein to process a plurality of substrates, a gas injector provided on a upper side of the process chamber to inject a processing gas into the processing space, a plurality of substrate supports arranged inside the process chamber, the substrates being seated on the substrate supports, a substrate conveyor disposed in the process chamber to convey the plurality of substrates to different substrate supports among the substrate supports, and a substrate rotating part arranged to allow each of the plurality of substrates to be seated between neighboring ones of the plurality of substrate supports, and to rotate the substrates, wherein the substrate rotating part may include a tension adjuster disposed on at least a portion of the power transmitter to adjust a tension in the power transmitter.