Substrate Scanner Integration for Inline Defect Detection
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current semiconductor processing systems face inefficiencies due to the need for substrates to wait for inspection results, leading to reduced throughput as unsatisfactory substrates require re-processing, which delays the overall processing.
Innovation Solution
Integration of a substrate scanner within the processing apparatus that captures surface image data in real-time during substrate transfer, allowing for immediate identification of defects and enabling continuous processing or rework decisions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional separate inspection apparatus is used, then inspection can be performed, but substrate must wait for inspection results causing reduced throughput
Solution Approach 1:
The inspection function is merged with the substrate processing apparatus by integrating a scanner that inspects substrates during their transfer through the processing chamber. This combines processing and inspection into a single integrated system, eliminating the need for separate inspection apparatus and the associated waiting time.
Solution Approach 2:
The scanner performs inspection of the substrate surface before the substrate completes its processing cycle. By conducting inspection preliminarily during transfer, the system can identify defective substrates early and remove them from further processing, preventing waste of processing time and resources on unsalvageable substrates.
2Measurement precision
If inspection is performed after processing, then defects can be identified, but considerable time is lost waiting for results and re-processing is required
Solution Approach 1:
The inspection process is made continuous by scanning the substrate surface during its uninterrupted transfer through the processing chamber. The scanner operates continuously as the substrate moves, eliminating idle waiting time while maintaining comprehensive inspection coverage of the entire substrate surface.
Solution Approach 2:
The system rushes through the inspection process by performing it rapidly during the brief transfer period. The scanner captures images quickly as the substrate passes through, completing inspection in the time otherwise spent on transfer, thereby eliminating additional waiting time while maintaining detection accuracy.
3Productivity
If substrate is inspected during transfer, then throughput is maintained, but requires integration of scanner at interface between process station and cassette station
Solution Approach 1:
The processing chamber serves multiple functions: it not only performs the intended substrate processing but also houses the scanner for inspection purposes. This multi-functionality reduces the need for additional dedicated inspection equipment and simplifies the overall system architecture despite the added inspection capability.
Solution Approach 2:
The transfer mechanism serving as the intermediary between cassette station and process station becomes the platform for mounting the scanner. By utilizing the existing transfer infrastructure and passage, the system integrates inspection without requiring completely new pathways or complex additional mechanisms, thereby managing device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables inline and real-time inspection, reducing re-processing needs and maintaining throughput by quickly identifying abnormalities in substrates during transfer, potentially replacing traditional inspection steps like AOI and AEI.
Implementation Method 1
the light emitting device produces a scan line impinging onto the top surface of the substrate, and wherein a reflected light comprising the surface image data is detected by the image sensor device
Data Source
AI summary
A substrate processing apparatus includes a process station for processing a substrate; a cassette station integrated with the process station; a substrate carriage equipped for transferring the substrate between said process station and the cassette station through a passage located at an interface between the process station and said cassette station; and a substrate scanner equipped at said interface between the process station and the cassette station for capturing surface image data during transportation of the substrate that passes through the passage.