Substrate Transport Schedule Optimization via Dynamic Batch Selection
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Solution Overview
Problem
Existing substrate processing apparatuses lack an effective method to determine when to access processing units for a series of substrate processes, making it impossible to suitably set a transport schedule for each substrate, thereby limiting throughput.
Innovation Solution
A schedule making device that compares judging time values for sequential and batch transport procedures to determine the optimal transport schedule, allowing for sequential or batch processing based on the completion times of substrates in different processing units, improving throughput by selecting the most efficient procedure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If sequential transport procedure is used, then transport simplicity is maintained, but throughput is reduced due to waiting time
Solution Approach 1:
The patent implements dynamic schedule creation that adapts to real-time processing conditions. The schedule making device continuously monitors processing unit status and dynamically adjusts transport schedules, switching between sequential and batch procedures based on current circumstances rather than using a fixed approach.
Solution Approach 2:
The system changes the transport procedure parameter based on processing completion times. When processing times indicate that batch transport will complete earlier than sequential transport, the system switches to batch procedure, and vice versa. This parameter adaptation optimizes throughput by selecting the most efficient transport mode for each situation.
2Productivity
If batch transport procedure is used, then throughput is improved by reducing waiting time, but transport complexity increases
Solution Approach 1:
The schedule making device automatically determines the optimal transport procedure by comparing processing completion times without requiring external intervention. The system self-adjusts between sequential and batch procedures based on real-time data from processing units, eliminating the need for manual schedule configuration while optimizing throughput.
Solution Approach 2:
The system uses feedback from processing unit completion times to continuously optimize transport schedules. By monitoring when substrates complete processing and using this information to determine the next transport procedure, the system creates a closed-loop control mechanism that adapts to changing conditions and maintains optimal throughput.
3Productivity
If transport schedule is not optimized, then operational simplicity is maintained, but productivity is limited
Solution Approach 1:
The patent replaces manual schedule management with an automated computational system. The schedule making device uses algorithmic comparison of processing times to determine optimal transport procedures, substituting mechanical decision-making processes with automated electronic control that optimizes throughput without increasing operational complexity for users.
Data Source
AI summary
To provide a technique capable of making a schedule with good time efficiency in schedule making for the transport of substrates. A schedule making device makes a judgment as to whether a batch carrying-out procedure can complete the transport earlier than a sequential carrying-out procedure or not, and selectively employs these procedures in accordance with a result of the judgment. The sequential carrying-out procedure is a procedure in which substrates are transported to a predetermined transport destination in chronological order of the times at which the transport process can start, and the batch carrying-out procedure is a procedure in which a substrate the transport process of which can start is not transported until a time at which the transport process of a succeeding substrate can start, and the substrates are transported together to a transport destination at the time when the transport process of the succeeding substrate can start.