Substrate Processing Scheduling for Q-Time-Constrained OR Transfer
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Solution Overview
Problem
In substrate processing devices, achieving optimal OR transfer that satisfies specified conditions for product quality, such as time-in-process (Q-time), is challenging due to variations in process module usage states and parallel processing efficiency.
Innovation Solution
A substrate processing device with an identifying unit to assess process module usage states, a calculating unit to assign processes to appropriate time slots, and a determining unit to set the start timing of processes, ensuring the calculated time duration meets the specified Q-time constraints.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If OR transfer is performed to improve processing efficiency through parallel processing, then productivity increases, but it becomes difficult to satisfy specified Q-time conditions for product quality
Solution Approach 1:
The system performs preliminary calculation of time duration for each possible OR transfer combination before actual processing. The determining unit pre-evaluates which process module assignments will satisfy Q-time conditions, and only then executes the transfer. This advance planning ensures both high productivity through parallel processing and compliance with quality time constraints.
Solution Approach 2:
The system dynamically adjusts the OR transfer strategy based on real-time usage states of process modules. The identifying unit continuously monitors module availability, and the determining unit flexibly selects optimal assignments that satisfy Q-time conditions while maximizing parallel processing efficiency. This dynamic adaptation resolves the contradiction between aggressive parallel processing and quality constraints.
2Productivity
If multiple process modules are utilized for parallel processing, then operation rate improves, but coordination complexity and difficulty of determining optimal start timing increase
Solution Approach 1:
The system segments the complex coordination problem into distinct functional units: an identifying unit that assesses module usage states, a calculating unit that computes time durations for specific assignments, and a determining unit that selects optimal start timing. This segmentation transforms the overwhelming coordination complexity into manageable discrete tasks, enabling efficient parallel processing with clear responsibility division.
Solution Approach 2:
The determining unit acts as an intermediary between the identifying unit (which knows module availability) and the execution system (which needs start timing instructions). It receives usage state information, calculates optimal assignments using time duration data, and outputs coordinated start timing commands. This intermediary structure simplifies the overall coordination complexity by centralizing the decision-making logic.
Data Source
AI summary
In a substrate processing device, a technique that achieves OR transfer satisfying a specified condition is provided. The substrate processing device includes an identifying unit configured to refer to usage states of a plurality of process modules at process time slots to identify one or more process modules that can execute processes of substrates included in a control job to be processed among process modules that can be used at the process time slots, a calculating unit configured to assign the processes of the substrates to respective process time slots of the one or more process modules identified by the identifying unit to calculate a time duration from a start to an end of the processes of the substrates, and a determining unit configured to determine start timing of starting the processes of the substrates so that the time duration calculated by the calculating unit satisfies a specified condition.