Substrate Processing Scheduling Under Transfer Priority Constraints
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Solution Overview
Problem
In substrate processing devices, generating an efficient substrate processing schedule is challenging when transport processes within the transport unit are incapable of being executed simultaneously, leading to variations in standby time and evaluation index deterioration based on prioritization of transport processes.
Innovation Solution
An information processing device that generates a substrate processing schedule by setting processing order, simultaneous processing, and transfer priority conditions for mathematical optimization, prioritizing the pre-polishing transfer process over the post-polishing transfer process, using acquired polishing, finishing, and transport times to determine start timings and minimize final processing end time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple transport processes are configured in the transport unit, then substrate processing capability is improved, but standby time increases when transport processes cannot be executed simultaneously
Solution Approach 1:
The patent implements dynamic scheduling that adjusts the execution order of transport processes based on real-time conditions. The control unit dynamically determines whether to execute pre-polishing transfer or post-polishing transfer first, optimizing substrate flow to minimize standby time while maintaining processing capability.
Solution Approach 2:
The patent performs preliminary calculation of multiple possible schedules before execution. By pre-calculating different transport process orderings and their impact on standby time, the system selects the optimal schedule in advance, preventing unnecessary delays during actual substrate processing.
2Ease of operation
If transport processes are prioritized in a fixed order, then execution simplicity is improved, but evaluation index deteriorates due to increased standby time
Solution Approach 1:
The system transitions from fixed prioritization to dynamic scheduling. The control unit evaluates multiple transport process orderings and selects the optimal sequence based on calculated standby time, achieving both operational simplicity and high productivity through automated optimization.
Solution Approach 2:
The patent changes the scheduling parameter from fixed priority to variable priority based on calculated metrics. By adjusting the execution order parameter dynamically, the system optimizes the evaluation index while maintaining ease of operation through automated decision-making.
3Productivity
If pre-polishing transfer and post-polishing transfer are executed simultaneously, then processing efficiency is improved, but device complexity increases due to transport unit configuration constraints
Solution Approach 1:
The patent performs preliminary calculation of transport schedules to determine the optimal execution order. By pre-calculating whether simultaneous execution is feasible or if sequential execution minimizes standby time, the system achieves efficient processing without requiring complex hardware modifications.
Solution Approach 2:
The control unit acts as an intermediary that coordinates transport process execution. It calculates and determines the optimal timing and order of pre-polishing and post-polishing transfers, enabling efficient processing through intelligent scheduling rather than hardware complexity.
Data Source
AI summary
An information processing device generates a substrate processing schedule for sequentially performing respective processes on a predetermined number of substrates in a substrate processing device. The information processing device includes a substrate processing time acquisition part which acquires polishing time and finishing time based on recipe information; a transport processing time acquisition part which acquires transport time; and a schedule generation part which generates a substrate processing schedule by setting a processing order condition, a simultaneous processing condition, a transfer processing priority condition which specifies that a pre-polishing transfer process is prioritized over a post-polishing transfer process as constraint conditions for mathematical optimization, setting final processing end time for a final substrate being the shortest as an objective function of the mathematical optimization, and performing the mathematical optimization which determines start timings of the respective processes.