Substrate Seating Deviation Control for Robot Offset Correction
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Solution Overview
Problem
In semiconductor and display device manufacturing processes, the movement offset of a robot transporting substrates is not effectively controlled, leading to deviations from the seating center point, which can result in incorrect processing due to the lack of real-time data accumulation and alarm systems to correct these deviations.
Innovation Solution
A processor-based system that accumulates seating point data to determine deviation tendencies, sets alarm levels based on predefined thresholds, and performs post-processing by generating alarms and adjusting the robot's movement offset to correct deviations from the seating center point.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the robot transports the substrate without real-time monitoring, then the operation is simple and fast, but the seating precision deteriorates due to movement offsets
Solution Approach 1:
The system implements feedback by continuously monitoring the substrate's seating position using a sensor, comparing it with the reference position, and automatically adjusting the robot's movement offset based on the detected deviation. This closed-loop control ensures high seating precision while maintaining operational simplicity through automated correction.
Solution Approach 2:
The system performs self-correction by automatically detecting seating deviations and adjusting the robot's movement parameters without external intervention. The control unit processes the position data and modifies the movement offset autonomously, enabling the system to maintain precision through self-regulation.
2Manufacturing precision
If the robot adjusts movement offset frequently to maintain precision, then the seating accuracy is improved, but the productivity deteriorates due to repeated adjustments
Solution Approach 1:
The system applies partial correction by adjusting the movement offset only for the detected deviation amount rather than performing full recalibration. This selective adjustment maintains seating accuracy while minimizing the time required for correction, thereby preserving productivity.
Solution Approach 2:
The system replaces complex mechanical recalibration procedures with automated sensor-based detection and control unit processing. This substitution enables rapid detection and correction of seating deviations without time-consuming manual adjustments, maintaining both precision and productivity.
3Reliability
If the system monitors and corrects seating deviations in real-time, then the processing quality is improved, but the device complexity increases due to additional sensors and control mechanisms
Solution Approach 1:
The control unit serves multiple functions: it processes seating position data, determines deviations from reference positions, calculates correction amounts, and adjusts robot movement parameters. This multi-functionality consolidates complex control tasks into a single integrated component, maintaining processing quality without proportionally increasing overall system complexity.
Solution Approach 2:
The sensor acts as an intermediary between the physical seating position and the control system, converting positional information into electrical signals that the control unit can process. This intermediary simplifies the interface between the mechanical substrate handling and the electronic control system, making the overall system more manageable despite the added monitoring capability.
4Reliability
If no alarm system is implemented, then the device complexity is low, but the reliability deteriorates due to undetected deviations
Solution Approach 1:
The alarm system provides feedback when seating deviations exceed predetermined thresholds, alerting operators to potential quality issues. This feedback mechanism enhances process reliability by enabling timely intervention while keeping the alarm system simple through threshold-based triggering rather than complex analysis.
Data Source
AI summary
An apparatus and a method for controlling a process are provided. An apparatus for controlling a process includes a processor, and a memory for storing a plurality of instructions executed by the processor, in which the plurality of instructions include an instruction for determining deviation tendency of a seating point of a substrate with respect to a seating center point of a substrate support based on a seating point data created by accumulating the seating points of the substrate seated on the substrate support, an instruction for determining an alarm level according to the determined deviation tendency, and an instruction for performing post-processing according to the determined alarm level, in which the seating point data includes a change of the seating point over time.