Substrate Sensor Horizontality Measurement Supercritical Cleaning
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Solution Overview
Problem
In semiconductor manufacturing, existing technologies fail to accurately measure the horizontality of substrate support members within high-temperature/high-pressure vessels used in supercritical fluid cleaning processes, which is crucial for maintaining the horizontal state of substrates like wafers.
Innovation Solution
A substrate type sensor system utilizing 3-axis or 6-axis acceleration sensors or IMUs, placed on the substrate support pins, that compares data collected at different angles to determine the horizontality of the support member, capable of measuring inclinations with precision of 0.1 degrees or less, even in high-temperature/high-pressure environments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If substrate support member is placed in high-temperature/high-pressure supercritical fluid environment, then substrate cleaning effectiveness is improved, but measurement of horizontality becomes impossible with existing technologies
Solution Approach 1:
The patent introduces an intermediary measurement system consisting of acceleration sensors mounted on the substrate support member that can operate within the high-temperature/high-pressure supercritical fluid environment. This intermediary device enables indirect measurement of horizontality by detecting gravitational acceleration components, thereby solving the measurement impossibility without compromising the cleaning process effectiveness
Solution Approach 2:
The patent replaces traditional mechanical level measurement systems with electronic acceleration sensors (IMUs) that can function in the harsh supercritical fluid environment. This substitution enables digital measurement of horizontality through gravitational force detection, overcoming the limitations of conventional mechanical measurement methods in high-temperature/high-pressure conditions
2Temperature
If temperature is increased to maintain supercritical fluid state, then cleaning process effectiveness is improved, but horizontality measurement accuracy deteriorates due to thermal effects on sensors
Solution Approach 1:
The patent addresses thermal measurement errors by implementing temperature compensation algorithms that adjust sensor readings based on the known thermal characteristics of the acceleration sensors. By changing the measurement parameters dynamically according to temperature conditions, the system maintains measurement accuracy despite operating in high-temperature supercritical fluid environments
Solution Approach 2:
The patent incorporates feedback mechanisms where temperature data from thermal sensors is continuously fed into the measurement system to compensate for thermal drift in acceleration sensor readings. This feedback loop enables real-time correction of measurement errors caused by high temperatures, maintaining precision throughout the cleaning process
3Stress or pressure
If pressure is increased to maintain supercritical fluid state, then cleaning process effectiveness is improved, but sensor operation and data transmission become more difficult
Solution Approach 1:
The patent introduces a pressure-resistant intermediary housing and sealing system that protects the acceleration sensors from direct exposure to high-pressure supercritical fluid while allowing gravitational force transmission. This intermediary structure enables sensor operation at high pressures without requiring complex sensor designs, thereby reducing overall system complexity
Solution Approach 2:
The patent implements a multi-functional integrated sensor module that combines acceleration sensing, temperature compensation, and pressure resistance in a single compact unit. This universal design reduces the number of separate components needed, simplifying the overall sensor system while maintaining effectiveness in high-pressure supercritical fluid environments
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise measurement and maintenance of the horizontal state of substrate support members during supercritical fluid cleaning, enhancing cleaning efficiency and ensuring accurate substrate treatment.
Implementation Method 1
at least one acceleration sensor or six-axis inertial measurement unit (IMU) that generates a measurement value according to a gravitational force
Data Source
AI summary
A substrate type sensor provided in an atmosphere accompanied by a temperature change to measure a horizontality of a support member that supports a substrate is disclosed. The substrate type sensor may include a base having a shape of the substrate, one or more sensors provided in the base and including 3 or more axis acceleration sensors or 6 or more axis measurement units (IMUs), a receiver configured to receive data collected by the one or more sensors and a power source configured to provide electric power to the one or more sensors and the receiver.