Substrate Pressure Sensor Panels for Chemical Impact Point Detection
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Solution Overview
Problem
Existing technologies face challenges in accurately determining the correct position of a fluid supply on a substrate during semiconductor device or flat plate display panel manufacturing, particularly when the substrate surface is hydrophobized. Additionally, it is difficult to assess whether the fluid supply is abnormal in terms of flow rate or pressure.
Innovation Solution
A substrate type sensor system comprising a substrate shape member, pressure sensor panels on both the front and back, a central module for data reception and transmission, and a battery for power. This system measures the impact point and impact force of chemicals discharged onto the substrate, allowing for real-time monitoring and correction of fluid supply settings.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If fluid supply to substrate is performed without impact measurement, then the process is simple, but the impact point and impact force cannot be determined accurately
Solution Approach 1:
The patent creates a virtual copy of the substrate by mapping pressure sensor readings to substrate coordinates. The pressure sensor panel detects impact forces and converts them into virtual impact points on the substrate surface, allowing indirect measurement without direct substrate contact during sensing.
Solution Approach 2:
The patent replaces direct mechanical impact measurement on the substrate with a pressure-sensitive panel that detects force distribution. The mechanical impact from fluid supply is converted into electrical signals through the pressure sensor panel, enabling non-contact impact force measurement.
2Manufacturing precision
If nozzle position is not precisely controlled, then the system is easier to operate, but the fluid supply position deviates from correct location
Solution Approach 1:
The patent implements a feedback system where pressure sensor panel data is continuously monitored and compared against target impact points. The central module processes this information and provides feedback for nozzle position adjustment, enabling automatic correction of positioning deviations without complex manual intervention.
Solution Approach 2:
The patent uses visual display of pressure distribution patterns to indicate nozzle positioning accuracy. Different pressure intensities and distributions are displayed to help operators quickly identify correct vs. incorrect nozzle positions, making positioning intuitive rather than requiring complex measurements.
3Reliability
If fluid supply abnormalities are not monitored, then the system consumes less energy, but abnormalities in supply amount and supply pressure cannot be detected
Solution Approach 1:
The patent uses partial monitoring by focusing pressure sensors only on critical impact zones rather than continuous full-surface monitoring. The system activates detailed measurement only when impact events occur, reducing overall power consumption while maintaining reliability for detecting supply abnormalities.
Solution Approach 2:
The pressure sensor panel automatically detects and reports abnormalities without requiring external monitoring systems. The system self-diagnoses fluid supply issues by analyzing pressure pattern deviations, eliminating the need for separate high-power monitoring equipment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enables easy determination of the correct fluid supply position on both the top and bottom surfaces of the substrate, facilitates precise setting of the nozzle location, and quickly identifies any abnormalities in fluid supply states, such as flow rate or pressure issues.
Implementation Method 1
a pressure sensor panel provided at the substrate shape member, the pressure sensor panel including a plurality of pressure sensors
Data Source
AI summary
A substrate type sensor includes a substrate shape member, a pressure sensor panel provided at the substrate shape member, the pressure sensor panel including a plurality of pressure sensors, a central module including a transmission unit, the reception unit receiving data from the pressure sensor panel, and a battery proving power to the pressure sensor panel and the central module.