Substrate Separation Apparatus Staged Transfer and Vacuum Control
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Solution Overview
Problem
The separation of flexible substrates from carrier substrates in electronic device manufacturing is often marred by damage, static electricity-induced contamination, and incomplete separation due to static electricity and foreign substance adherence.
Innovation Solution
A substrate separation apparatus and method that employs an upper and lower transfer part system with specific transfer sections and a separator mechanism to gradually separate substrates while controlling static electricity through ion generators, minimizing stress and contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional separation method is used to separate the carrier substrate and flexible substrate, then the separation process is simple, but the electronic device may be damaged or cracked and contamination may occur due to static electricity
Solution Approach 1:
The lower transfer part is divided into multiple transfer sections (first transfer section, second transfer section, third transfer section) with different functions. The first transfer section transfers the flexible substrate while the second and third sections gradually separate it from the carrier substrate, reducing damage risk through staged separation
Solution Approach 2:
A separator is introduced as an intermediary component between the upper and lower transfer parts. This separator includes a separation part that physically inserts between the carrier substrate and flexible substrate to facilitate clean separation, and a suction part that controls the separation process through vacuum attraction
2Productivity
If separation is performed quickly to improve productivity, then the separation efficiency increases, but static electricity generation increases causing contamination and incomplete separation
Solution Approach 1:
The flexible substrate is transferred continuously through multiple transfer sections without interruption. The continuous transfer through the first, second, and third transfer sections maintains steady motion that reduces static electricity generation compared to stop-start separation methods
Solution Approach 2:
The separator uses a suction part with vacuum suction to control the separation process instead of relying solely on mechanical force. This vacuum-based control reduces friction and static electricity generation while maintaining precise separation
3Stability of the object's composition
If the carrier substrate and flexible substrate are pressed together firmly to prevent contamination, then adhesion is improved, but static electricity generation increases causing foreign substance adherence
Solution Approach 1:
The separator incorporates a suction part that uses vacuum pressure (pneumatics) to hold and control the flexible substrate during separation. This pneumatic control provides stable adhesion without the mechanical pressing that generates static electricity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables stable and contamination-free separation of flexible substrates from carrier substrates, reducing the risk of damage and improving the efficiency of the substrate separation process.
Implementation Method 1
a separator configured to separate the first substrate and the second substrate, while the upper holding unit is configured to move in the first direction, the separator includes a suction part that contacts the first substrate and the second substrate, and a driving unit that moves the separator in the first direction
Data Source
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AI summary
An apparatus for separating a first substrate (13) and a flexible second substrate (11) which are in contact with each other, includes an upper transfer part (300) which fixes the first substrate (13) and transfers the first substrate (13) in a positive X-axis (A) direction in an XY coordinate system comprised of an X axis and an Y axis which perpendicularly intersect each other and a lower transfer part (100) which is disposed under the upper transfer part (300) with a gap therebetween and fixes and transfers the second substrate (11), wherein the lower transfer part (100) comprises a first transfer section (111) which transfers the second substrate (11) in the positive X-axis direction (A), and a second transfer section (113) which transfers the second substrate (11) in the positive X-axis direction as well as a negative Y-axis direction.