Substrate Shape Simulation Reliability Across Processing Steps
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
There is a discrepancy between predicted substrate shapes obtained through shape simulation and actual substrate shapes due to differences in simulation conditions and actual processing conditions, leading to low reliability of the predicted shapes.
Innovation Solution
A computer program and information processing apparatus that acquires shape features from predicted and actual substrate processing, calculates reliability by comparing these features, and outputs the relationship between processing steps and reliability, allowing for accurate prediction of substrate shapes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If shape simulation is performed using a model created under predetermined conditions, then a predicted substrate shape can be obtained, but reliability is low when simulation conditions differ from actual processing conditions
Solution Approach 1:
The patent applies dynamics by making the shape simulation adaptable to different conditions. The system dynamically adjusts the simulation parameters and model characteristics based on the specific recipe and processing conditions being evaluated, allowing the same simulation system to reliably predict shapes across varying conditions rather than being static and condition-specific
Solution Approach 2:
The patent implements parameter changes by systematically varying simulation parameters and comparing results across different condition sets. The system changes parameters such as processing conditions, recipe configurations, and model inputs to evaluate how predictions hold across different scenarios, thereby assessing and improving reliability under varied conditions
2Measurement precision
If shape simulation is performed to predict substrate shape, then processing outcomes can be forecasted, but error occurs when model creation conditions differ from simulation execution conditions
Solution Approach 1:
The patent applies segmentation by breaking down the shape simulation process into distinct modules: model creation module, simulation execution module, and reliability evaluation module. Each module handles specific aspects of the simulation, allowing for independent optimization and reducing overall system complexity while maintaining prediction accuracy
Solution Approach 2:
The patent implements feedback by introducing a reliability evaluation mechanism that compares simulation results across different conditions and provides feedback on prediction accuracy. This feedback loop allows the system to identify and correct discrepancies between model creation conditions and simulation execution conditions, improving measurement precision
Data Source
AI summary
Provided are a non-transitory computer-readable storage medium, an information processing method, and an information processing apparatus that can obtain reliability of a predicted shape obtained through a shape simulation. The non-transitory computer-readable storage medium executes, via a computer, a method comprising acquiring a first shape feature that characterizes a predicted shape obtained by prediction using a model for simulating processing on a substrate, simulating, using the model, processing according to any recipe on a substrate having any shape, and calculating a second shape feature that characterizes a predicted shape of the substrate at a stage when processing according to each processing step in the any recipe is performed, comparing the second shape feature with the first shape feature to calculate reliability of the predicted shape after each processing step in the any recipe, and outputting a relationship between each processing step and the reliability.