Multi-Stage Substrate Transport with Positional Shift Detection

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Solution Overview

Problem

Existing substrate transport systems face challenges in accurately determining positional shifting of multiple substrates held in multiple stages, which can lead to reduced transport reliability and efficiency.

Innovation Solution

A substrate transport apparatus with a base, a retractable holding device, and three detection components that estimate substrate positions and calculate shifting amounts within threshold values, allowing for precise determination and execution of substrate transport.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If multiple substrates are held in multiple stages by a retractable holding device, then substrate transport capacity is improved, but positional shifting detection accuracy deteriorates

Engineering Contradiction:

Improvesubstrate transport capacityVSAvoidpositional shifting detection accuracy

Core Design Contradiction:

ProductivityVSMeasurement precision

Solution Approach 1:

The detection device is divided into three separate detection components positioned at different locations (first, second, and third detection components). Each component detects substrate positions from different perspectives, and the control device integrates these segmented detection results to calculate comprehensive positional shifting amounts for multiple substrates held in multiple stages, thereby maintaining detection accuracy while handling multiple substrates simultaneously

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The control device acts as an intermediary that receives detection results from three separate detection components and processes them to estimate substrate positions and calculate shifting amounts. This intermediary processing enables accurate positional detection of multiple substrates in multiple stages by synthesizing information from multiple detection points

Inventive Principle:

Principle #24Intermediary (Mediator)

2Measurement precision

If three detection components are used to detect substrate peripheries from different positions, then positional detection accuracy is improved, but device complexity increases

Engineering Contradiction:

Improvesubstrate position estimation accuracyVSAvoiddetection device structure

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

Each of the three detection components serves multiple functions: detecting substrate peripheries, providing positional information for estimation, and contributing to shifting amount calculation. This multi-functionality allows the detection components to achieve high positional detection accuracy without requiring additional specialized devices, thereby limiting the increase in overall device complexity

Inventive Principle:

Principle #6Universality (Multi-functionality)

Data Source

PatentUS9960063B2Substrate transport apparatus and substrate transport method

Publication Date: 2018.05.01 TOKYO ELECTRON LTD

AI summary

An apparatus for transporting a substrate includes a base, a holding device which retracts relative to the base and holds multiple substrates in multiple stages, respectively, a detection device including three detection components such that the three detection components are positioned to detect peripheries of the substrates held by the holding device from different positions, respectively, and a control device including circuitry which estimates a position of the substrates based on detection result of the detection device, calculates an amount of shifting between a base position and an estimated position of the substrates, determines whether a calculated amount of shifting is within a threshold value, and executes transport of the substrates held by the holding device when the calculated amount of shifting is determined to be within the threshold value.