Substrate Solvent Dewatering Loop for Faster Membrane Separation
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Solution Overview
Problem
Existing substrate processing methods face challenges in efficiently separating water from a mixed solution of water and organic solvents like IPA, which is necessary for recycling, due to the use of separation membranes that require enhanced efficiency.
Innovation Solution
A substrate processing apparatus and method that includes a circulation pipe system with a dewaterer, pump, and heater, operating at a separation pressure higher than circulation pressure and heating the mixed fluid to a predetermined temperature, to enhance the separation efficiency of water from the mixed fluid using a separation membrane.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a separation membrane is used to separate water from the mixed solution of water and organic solvent, then water separation can be achieved, but the separation efficiency is insufficient and time-consuming
Solution Approach 1:
The patent applies parameter changes by heating the mixed solution to a predetermined temperature before separation. This temperature parameter change enhances the separation efficiency of the membrane, allowing water to pass through more rapidly while maintaining effective separation. The heated state modifies the physical properties of the mixed solution, improving permeation rates and reducing separation time without compromising separation quality.
Solution Approach 2:
The patent implements preliminary action by pre-heating the mixed solution to a predetermined temperature before it enters the separation membrane. This preliminary thermal treatment prepares the mixed solution for more efficient separation, reducing the time required during the actual separation process. The pre-heating step modifies the solution properties in advance, enabling faster water permeation through the membrane.
2Productivity
If the separation membrane allows water to pass through efficiently, then water separation is improved, but the organic solvent may also pass through, compromising solvent integrity
Solution Approach 1:
The patent utilizes parameter changes by controlling the temperature of the mixed solution at a predetermined level that optimizes water permeation while maintaining organic solvent retention. This specific temperature parameter creates optimal conditions where water molecules have sufficient energy to pass through the membrane pores, while the larger organic solvent molecules remain blocked, ensuring both high separation efficiency and solvent integrity.
Solution Approach 2:
The patent employs a separation membrane with specific pore characteristics that, when combined with temperature control, allows selective passage of water molecules while blocking organic solvent molecules. The membrane's porous structure, when operated at the predetermined temperature, creates size and energy-based selectivity that maintains solvent integrity while achieving efficient water separation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively separates water from the mixed fluid, improving the efficiency of recycling organic solvents by maintaining the integrity of the solvent and reducing the time required for separation.
Implementation Method 1
a dewaterer (621) disposed in the circulation pipe (62) and including a separation membrane (51) that allows water to pass through and does not allow the organic solvent to pass through
Implementation Method 2
the pump (622) pressurizes the mixed fluid at a separation pressure higher than a circulation pressure necessary for circulation
Implementation Method 3
the heater (623) heats the mixed fluid to a predetermined heating temperature, in a state where the mixed fluid circulates through the first pipe (62a) and the bypass pipe (62c)
Data Source
AI summary
A circulation pipe is connected to a collection tank storing a mixed fluid containing water and an organic solvent, and includes: a first pipe connecting a downstream side of a second position and an upstream side of a first position; a second pipe connecting a downstream side of the first position and an upstream side of the second position; and a bypass pipe connecting the downstream side of the first position and the upstream side of the second position through a path different from that of the second pipe. The dewaterer is disposed in the first pipe or the bypass pipe, and the pump pressurizes the mixed fluid at a separation pressure higher than a circulation pressure and the heater heats the mixed fluid, in a state where the mixed fluid circulates through the first pipe and the bypass pipe.