Substrate Processing Solvent Supply Uniformity
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Solution Overview
Problem
Existing substrate processing systems face challenges in uniformly supplying solvents to collect entangled lumps, leading to inefficient removal and potential solvent wastage due to non-uniform flow rates and immediate solvent introduction into specific communication holes.
Innovation Solution
A substrate processing apparatus with a solvent supply system featuring an inner and outer storage space partitioned by communication holes and dripping holes, where the solvent introduced through an inlet hole fills the outer space and flows uniformly into the inner space, ensuring a consistent flow rate and effective solvent distribution to the collecting member, aided by a protrusion member for controlled solvent drop.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If solvent is introduced directly into communication holes, then solvent supply is achieved, but non-uniform flow rates occur and solvent is wasted
Solution Approach 1:
The storage space is divided into an inner storage space and an outer storage space by a partition wall with multiple communication holes. This segmentation allows the solvent to be distributed more uniformly through the communication holes from the outer space to the inner space, preventing direct introduction into specific holes and reducing wastage.
Solution Approach 2:
The inner storage space is nested within the outer storage space, with the partition wall containing communication holes forming the boundary between them. This nested configuration allows the solvent to flow from the outer space through the communication holes into the inner space, ensuring uniform distribution and controlled supply to the collecting member.
2Productivity
If solvent is introduced immediately into specific communication holes, then solvent reaches the collecting member, but flow rate consistency is poor
Solution Approach 1:
The partition wall is divided into multiple communication holes arranged at predetermined intervals, segmenting the solvent introduction path. This ensures that solvent is distributed uniformly across multiple holes rather than concentrated in specific holes, maintaining consistent flow rates and improving processing efficiency.
Solution Approach 2:
The communication holes are positioned at specific locations on the partition wall to optimize solvent distribution. The outer storage space is designed to surround the inner storage space, creating a localized flow path that ensures uniform solvent supply to each communication hole, thereby maintaining flow rate consistency.
3Device complexity
If single storage space is used, then device complexity is reduced, but solvent distribution uniformity is poor
Solution Approach 1:
The storage space is segmented into inner and outer storage spaces by a partition wall with communication holes. This segmentation improves solvent distribution uniformity by allowing the solvent to flow from the outer space through multiple communication holes into the inner space, which then distributes it to the collecting member, without significantly increasing device complexity.
Solution Approach 2:
The inner storage space is nested within the outer storage space, creating a compact dual-chamber structure. This nested design achieves uniform solvent distribution through the communication holes while maintaining a space-efficient configuration that does not substantially increase overall device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures uniform solvent supply and effective removal of entangled lumps, reducing solvent wastage and improving processing efficiency by maintaining consistent flow rates and controlled solvent distribution.
Implementation Method 1
The solvent introduced into the outer storage space flows into the inner storage space through multiple communication holes provided in the partition wall
Implementation Method 2
The inner storage space includes multiple dripping holes extended to penetrate a bottom wall of the inner storage space such that the solvent within the inner storage space drops toward the collecting member
Data Source
AI summary
A substrate processing apparatus includes a cover member placed to surround a substrate held by a rotary holder; a collecting member placed in an exhaust path formed between the cover member and the rotary holder; and a solvent supply placed above the collecting member and configured to supply a solvent to the collecting member. The solvent supply includes an inner storage space surrounding the substrate; an outer storage space surrounding the inner storage space; and a partition wall extending along a circumferential direction to partition the inner storage space and the outer storage space. Multiple communication holes are extended to penetrate the partition wall such that the solvent introduced into the outer storage space flows to the inner storage space. Multiple dripping holes are extended to penetrate a bottom wall of the inner storage space such that the solvent within the inner storage space drops toward the collecting member.