Substrate Stage Air Floating System for Inkjet Printing
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Solution Overview
Problem
Inkjet printing systems for forming patterns on substrates face inefficiencies due to inconsistent substrate movement, leading to inaccurate ink droplet placement, as the substrate must maintain a constant lift to ensure precise targeting.
Innovation Solution
A substrate processing apparatus featuring a stage with an air floating system, a gantry, a head module, and a displacement sensor that measures separation distances between the substrate and the stage at different positions, allowing for real-time monitoring and maintenance to ensure consistent inkjet printing accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the substrate moves at constant speed during inkjet printing, then productivity is improved, but manufacturing precision deteriorates due to inconsistent substrate lift causing inaccurate ink droplet placement
Solution Approach 1:
The patent employs a displacement sensor to continuously measure the actual separation distance between the substrate and stage, providing real-time feedback to the control unit. The control unit then adjusts the substrate movement speed dynamically based on this feedback to maintain constant separation distance, thereby ensuring accurate ink droplet placement while maintaining high productivity
Solution Approach 2:
The system transitions from constant speed movement to dynamic speed adjustment. The substrate movement speed is continuously varied based on real-time separation distance measurements, allowing the system to adapt to variations in substrate lift and maintain manufacturing precision throughout the printing process
2Manufacturing precision
If the substrate separation distance is maintained constantly for accurate ink placement, then manufacturing precision is improved, but device complexity increases due to additional sensors and control systems
Solution Approach 1:
The patent replaces complex mechanical positioning mechanisms with a simpler sensor-based measurement and electronic control system. Instead of using精密 mechanical structures to maintain constant separation distance, the system uses a displacement sensor to measure the distance and electronically controls the substrate movement, thereby achieving high precision with reduced mechanical complexity
3Manufacturing precision
If real-time monitoring of separation distance is implemented, then manufacturing precision is maintained, but use of energy increases due to continuous sensor operation and active control
Solution Approach 1:
The displacement sensor operates continuously during substrate movement to maintain constant separation distance, ensuring uninterrupted accurate inkjet printing. This continuous monitoring and adjustment prevents positioning errors that would require rework or correction, thereby reducing overall energy consumption despite the sensor's continuous operation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus enhances the efficiency and productivity of substrate treatment by maintaining consistent separation distances, thereby improving the accuracy and reliability of ink placement on the substrate.
Implementation Method 1
a stage (110) extending in a first direction, configured to move a substrate (150) in the first direction, and having an air floating system
Data Source
AI summary
The present disclosure provides a substrate treating apparatus having improved efficiency and productivity. The substrate treating apparatus provided includes a stage extending in a first direction, for moving a substrate in the first direction, and having an air floating system, a gantry arranged on the stage to extend in a second direction crossing the first direction, a head module installed on the gantry and movable in the second direction, and a displacement sensor installed in the head module, for measuring a separation distance between the substrate and stage, wherein at a first position, the head module ejects ink to the substrate and the displacement sensor measures a first separation distance between the substrate and the stage, and at a second position that is different from the first position, the head module ejects ink to the substrate and the displacement sensor measures a second separation distance between the substrate and the stage.