Substrate Stage Blocking Structure for Particle-Free Exposure Handling
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Solution Overview
Problem
Foreign substances generated during the movement of positioning devices in substrate processing apparatuses contaminate semiconductor substrates, leading to defects due to their introduction onto the substrate through airflow.
Innovation Solution
A substrate processing apparatus with a blocking member comprising a vertical and horizontal blocking plate to prevent the inflow of foreign substances, which includes a vertical blocking plate extending in the vertical direction to cover the substrate stage and a horizontal blocking plate extending in the horizontal direction to cover the guide rail trench, thereby blocking airflow and preventing foreign substance discharge.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a guide rail with an open trench is used to enable slider movement, then the positioning device can move smoothly along the guide rail, but foreign substances can flow into the trench and be introduced onto the semiconductor substrate by airflow
Solution Approach 1:
The blocking member is divided into two separate plates: a vertical blocking plate that covers the side wall of the substrate stage, and a horizontal blocking plate that covers the guide rail trench. This segmentation allows each plate to perform its specific blocking function independently while maintaining overall effectiveness in preventing foreign substance contamination.
Solution Approach 2:
The blocking member acts as an intermediary structure positioned between the guide rail and the substrate stage. It intercepts and blocks foreign substances before they can be introduced onto the substrate by airflow, while still allowing the positioning device to move normally along the guide rail.
2Object-affected harmful factors
If a fixed blocking structure is added to prevent foreign substance inflow, then substrate contamination is reduced, but the complexity of the device increases
Solution Approach 1:
The blocking member is designed to be detachable rather than fixed, allowing it to be removed or adjusted when needed. This dynamic design reduces the permanent structural complexity of the device while maintaining the blocking function during operation. The blocking member can be easily installed and removed without permanent modification to the guide rail or substrate stage.
Solution Approach 2:
The blocking member uses thin plate structures (vertical and horizontal blocking plates) that provide effective blocking functionality with minimal material and structural complexity. These thin plate configurations achieve the contamination prevention goal without adding significant weight, space, or manufacturing complexity to the overall device.
3Object-affected harmful factors
If a blocking member is added to cover the guide rail trench, then foreign substance discharge is prevented, but cleaning and maintenance become more difficult
Solution Approach 1:
The blocking member is designed as a detachable component that can be easily removed from the guide rail assembly. This allows maintenance personnel to access the guide rail trench for cleaning and inspection by simply removing the blocking member, without disassembling other parts of the positioning device or guide rail structure. The detachable design directly addresses the maintenance accessibility issue.
Solution Approach 2:
The blocking member is extracted as a separate, removable component rather than being integrated permanently into the guide rail or substrate stage. This extraction allows the blocking function to be maintained during operation while enabling easy access to the guide rail trench for cleaning and maintenance by removing only the blocking member.
Data Source
AI summary
A substrate processing apparatus includes a table in an exposure chamber that is configured to perform an exposure process on a semiconductor substrate, a guiding device including a first horizontal driving body slidably movable in a first horizontal direction and a guide rail on the first horizontal driving body and having a trench extending in a second horizontal direction, a positioning device connected to the guiding device, the positioning device including a slider, a second horizontal driving body and a substrate stage, the slider configured to slidably move in the second horizontal direction along the trench, the second horizontal driving body connected or fixed to the slider, the substrate stage on the second horizontal driving body and configured to support the semiconductor substrate, and a blocking member between the guide rail and the substrate stage to block an inflow of foreign substances onto the substrate stage.