Substrate Support Stage Flow Control for Multi-Zone Temperature Uniformity
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in precisely controlling the temperature of substrates across multiple zones, leading to inconsistent temperature management and reduced independent controllability.
Innovation Solution
The apparatus includes a substrate support stage with recesses, supply and collection pipes, and flow rate adjusting valves, allowing for the precise control of heat transfer medium flow rates and positions to adjust substrate temperatures, enabling independent temperature control across multiple zones.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If heat transfer medium is supplied to substrate support stage to control temperature, then temperature control capability is improved, but independent controllability across multiple zones deteriorates
Solution Approach 1:
The substrate support stage is divided into multiple independent temperature control zones, each with its own recess, supply pipe, and flow rate adjusting valve. This segmentation allows each zone to control heat transfer medium flow independently, enabling separate temperature adjustment for different substrate regions without affecting other zones.
Solution Approach 2:
Each zone is equipped with dedicated flow rate adjusting valves and supply pipes that can be individually controlled. This local quality approach ensures that temperature control parameters can be optimized independently for each zone based on specific substrate processing requirements, achieving both temperature control and independent adaptability.
2Adaptability or versatility
If multiple zones are controlled independently with separate supply pipes and valves, then independent controllability is improved, but device complexity increases
Solution Approach 1:
The supply pipes and flow rate adjusting valves are integrated into a unified system architecture where each component serves multiple functions. The supply pipes deliver heat transfer medium to multiple zones, and the flow rate adjusting valves can be controlled collectively or individually, allowing the system to operate in both independent and coordinated modes, thereby managing complexity while maintaining versatility.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for precise and independent temperature control of substrates across multiple zones, maintaining consistent temperature management and enhancing controllability, even when changes occur in one zone without affecting others.
Implementation Method 1
The substrate support provides at least one recess that opens downward. The at least one supply pipe includes an opening end that opens upward in the at least one recess. The at least one supply pipe is configured to supply a heat transfer medium to the at least one recess.
Data Source
AI summary
A disclosed substrate processing apparatus includes a processing chamber, a substrate support stage. The substrate support provides at least one recess. The at least one recess opens downward. The at least one supply pipe is configured to supply a heat transfer medium to the at least one recess. The at least one partition forms at least one space together with the substrate support stage. The at least one space include the at least one recess. The at least one collection pipe is configured to collect the heat transfer medium from the at least one space. The at least one flow rate adjusting valve that is connected to the at least one supply pipe. The controller is configured to control the at least one flow rate adjusting valve to adjust a flow rate of the heat transfer medium supplied to the at least one supply pipe.