Substrate Adsorption Stage With Insertable Mask Alignment

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Existing substrate adsorption devices require labor-intensive adjustments and costly replacements when handling substrates of varying sizes and shapes, as stages need to be changed to accommodate different substrates, leading to inefficiencies in the fabrication process.

Innovation Solution

A substrate adsorption device featuring a stage with first adsorption holes and an insert port, along with a mask having corresponding second adsorption holes or openings, allows for alignment and vacuum formation to accommodate substrates of different shapes without needing stage replacement, using vacuum holes and pumps for gas discharge.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the stage is changed for each substrate to accommodate different sizes and shapes, then the substrate adsorption device can handle various substrate types, but labor efforts for setting planarization increase and costs for stage replacement occur

Engineering Contradiction:

Improveability to handle various substrate sizes and shapesVSAvoidlabor efforts for stage setting and replacement

Core Design Contradiction:

Adaptability or versatilityVSEase of operation

Solution Approach 1:

The stage is designed with a universal structure that can accommodate substrates of various sizes and shapes through a single standardized stage design. The stage includes multiple adsorption holes arranged in a grid pattern and an insert port that accepts different mask patterns, allowing one stage to perform multiple substrate handling functions without requiring physical replacement or reconfiguration of the stage itself.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

A mask is introduced as an intermediary component between the stage and the substrate. The mask has patterns corresponding to different substrate types and is inserted through the insert port. This mask acts as a mediator that adapts the universal stage to specific substrate requirements, eliminating the need to change the stage itself while maintaining proper adsorption alignment.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Adaptability or versatility

If the stage is changed for each substrate, then various substrate types can be accommodated, but costs for stage replacement increase

Engineering Contradiction:

Improveability to handle various substrate sizes and shapesVSAvoidcosts for stage replacement

Core Design Contradiction:

Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

Instead of replacing expensive stages for different substrate types, the invention uses relatively inexpensive masks that can be easily manufactured and replaced. The masks are the disposable/replaceable component rather than the stage, significantly reducing costs while maintaining adaptability to various substrate types.

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

3Reliability

If adsorption holes are positioned in the upper surface of the stage, then vacuum regions can be formed corresponding to product shapes, but the structure becomes more complex

Engineering Contradiction:

Improvevacuum region formation accuracyVSAvoidstage structure complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The adsorption system is segmented into discrete adsorption holes arranged in a grid pattern on the stage upper surface. Each hole can be independently controlled to form vacuum regions, allowing precise matching of vacuum patterns to substrate shapes. This segmentation enables reliable vacuum formation while maintaining a relatively simple overall structure through modular hole arrangement rather than complex continuous vacuum systems.

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables efficient adsorption of substrates with varying sizes and shapes by maintaining stage planarization, reducing labor efforts and costs associated with stage adjustments and replacements.

Implementation Method 1

a vacuum pump that suctions gas from the stage. The vacuum hole may be connected to the vacuum pump.

Methodology Applied

Scientific EffectVacuum: Vacuum

Data Source

PatentUS20250222565A1Substrate adsorption device

Publication Date: 2025.07.10 SAMSUNG DISPLAY CO LTD

AI summary

A substrate adsorption device may include a stage including first adsorption holes and an insert port, and allowing a product to be placed on an upper surface of the stage; and a mask having a shape substantially identical to a shape of the product, and including second adsorption holes. In case that the mask is inserted into the stage along the insert port, the second adsorption holes may be aligned with some of the first adsorption holes in a plan view.