Substrate Stage Deviation Measurement Using Rotational Position Detection
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Solution Overview
Problem
In substrate processing apparatuses, relative positional deviations between substrate stages and substrates occur due to installation errors and thermal expansion, making accurate measurement challenging with visual confirmation, especially in multi-substrate processing environments where it is time-consuming and inaccurate.
Innovation Solution
A method involving detecting the initial and final positions of substrates after rotation by a predetermined angle, calculating positional deviations of substrate stages using sensors and rotational data, and adjusting positions automatically to correct deviations without exposing the processing container to air.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If visual confirmation is used to measure positional deviation, then the measurement method is simple, but the measurement precision and productivity deteriorate due to time-consuming manual operations and inaccuracy
Solution Approach 1:
The patent replaces manual visual confirmation with an automated detection system using sensors (such as cameras or position sensors) to detect substrate positions. The detection unit automatically captures position information of substrates on the substrate stage, eliminating the need for manual visual measurement and significantly improving both measurement precision and productivity.
Solution Approach 2:
The system performs self-measurement of positional deviations by automatically detecting substrate positions, calculating deviations from intended positions, and identifying affected substrates without requiring external manual intervention. The substrate processing apparatus autonomously completes the entire measurement and identification process.
2Measurement precision
If visual confirmation is used to measure positional deviation, then no additional equipment is needed, but the measurement precision deteriorates due to human error and the process becomes time-consuming
Solution Approach 1:
The detection unit is designed to serve multiple functions: detecting substrate positions, calculating positional deviations, identifying affected substrates, and providing data for correction processes. This multi-functional design reduces the need for separate specialized devices while maintaining high measurement precision.
Solution Approach 2:
The patent introduces a detection unit as an intermediary between the substrate stage and the control system. This intermediary automatically captures position data and transmits it to the control unit for processing, eliminating the need for direct human visual measurement while keeping the overall system architecture relatively simple.
3Productivity
If manual measurement methods are used, then the device complexity is low, but the productivity and measurement precision deteriorate due to time-consuming operations
Solution Approach 1:
The patent merges the detection function, calculation function, and correction control function into an integrated system. The detection unit, control unit, and substrate stage work together as a unified automated system that simultaneously performs measurement and initiates correction, significantly improving productivity while managing device complexity through functional integration.
Solution Approach 2:
The system performs preliminary detection of substrate positions and calculation of positional deviations before the actual substrate processing begins. This preliminary measurement allows the system to prepare correction data in advance, enabling rapid response and correction during the processing operation, thereby improving overall productivity.
Data Source
AI summary
A method of measuring a positional deviation of a substrate stage in a substrate processing apparatus provided rotatably inside a processing container, includes: detecting an initial position of a substrate transferred by an arm that transfers the substrate; placing the substrate on the substrate stage; rotating the substrate by a predetermined rotational angle by rotating the substrate stage; delivering the substrate after rotation from the substrate stage to the arm; detecting a position of the substrate after rotation transferred by the arm; and calculating the positional deviation amount of the substrate stage with respect to the initial position of the substrate based on the initial position of the substrate, the position of the substrate after rotation, and the rotational angle.