Substrate Transport Stage Support for Faster Stable Wafer Transfer
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing batch-type substrate processing apparatuses experience long transport times and apply significant stress to mounting stages during substrate transfer, leading to substrate displacement.
Innovation Solution
A substrate processing apparatus with a conveyor system that holds the mounting stage at two vertical positions, using lower and upper holders, and a controller for precise transport control, reducing stress and displacement during acceleration and deceleration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the mounting stage is transported by using a lower side of the mounting stage as a fulcrum, then the transport structure is simplified, but a large stress is applied to the upper side of the mounting stage causing substrate displacement
Solution Approach 1:
The mounting stage is divided into multiple holding points (lower fulcrum and upper support) to segment the stress distribution. This allows the stage to be supported at multiple locations simultaneously, reducing the stress concentration that would occur with a single fulcrum point while maintaining the simplicity of the transport mechanism.
Solution Approach 2:
The support structure transitions from one-dimensional (single fulcrum point) to two-dimensional support by adding upper holding points in addition to the lower fulcrum. This multi-point support system distributes the stress across multiple locations, preventing substrate displacement while keeping the transport structure relatively simple.
2Manufacturing precision
If acceleration and deceleration are reduced to prevent substrate displacement, then substrate stability is improved, but transport time increases
Solution Approach 1:
The mounting stage is prepared in advance with proper support at both lower and upper points before transport begins. This preliminary configuration ensures that the stage is structurally ready to handle transport forces, allowing for smoother acceleration and deceleration without compromising substrate stability, thereby maintaining higher transport speeds.
Solution Approach 2:
The transport system uses dynamic control of acceleration and deceleration profiles that adapt to the loaded state of the mounting stage. By optimizing these parameters based on real-time conditions, the system maintains substrate stability while minimizing transport time, resolving the contradiction between precision and productivity.
3Device complexity
If a single fulcrum point is used for transport, then the holding structure is simplified, but substrate displacement occurs due to stress concentration
Solution Approach 1:
The holding structure segments the support function into multiple discrete points (lower fulcrum and upper support points) rather than relying on a single fulcrum. This segmentation distributes the mechanical stress across multiple locations, preventing the stress concentration that causes substrate displacement while maintaining overall structural simplicity.
Solution Approach 2:
Upper support points act as intermediary elements between the transport mechanism and the substrate. These intermediaries provide additional support that distributes forces away from the substrate, enhancing reliability without significantly complicating the holding structure.
Data Source
AI summary
There is provided a technique that includes: at least one process chamber in which at least one substrate is processed; a mounting stage configured to be capable of mounting the at least one substrate on the mounting stage; a transport chamber including a conveyor configured to be capable of holding the mounting stage at least two places in a vertical direction and transporting the mounting stage; and a controller configured to be capable of performing a transport control of the conveyor in the transport chamber.