Substrate Processing Startup Control Using Staggered Test Operations
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Solution Overview
Problem
Conventional substrate processing systems face delays in starting the first actual operation of the substrate processing component group, as they often require completing test operations for all devices, leading to prolonged startup times.
Innovation Solution
The system segregates substrate processing components into a first set used for the initial actual operation and a second set used subsequently, with a controller managing test and actual operations to initiate the first actual operation promptly after completing the test of the first set, and starting the test of the second set during the first actual operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If test operations are performed for all devices in the substrate processing component group before the first actual operation, then system reliability is ensured, but the startup time for the first actual operation is prolonged
Solution Approach 1:
The substrate processing component group is divided into a first substrate processing component (for the first actual operation) and a second substrate processing component (for subsequent actual operations). Test operations are performed only on the first substrate processing component before the first actual operation, rather than testing all devices. This segmentation allows the first actual operation to start sooner while still ensuring reliability of the initially used components.
Solution Approach 2:
Test operations are performed in advance on the first substrate processing component that will be used for the first actual operation. This preliminary testing ensures reliability of the specific component that will be immediately used, without delaying the startup by testing all other components that will be used later.
2Productivity
If the substrate processing component group is divided into first and second components with staggered test operations, then productivity is improved, but device complexity increases
Solution Approach 1:
The substrate processing component group is segmented into first and second substrate processing components based on their usage timing. The first component is designated for the first actual operation while the second component is designated for subsequent operations. This clear segmentation simplifies management by associating each component with a specific operational phase, despite the apparent division.
Solution Approach 2:
The first substrate processing component undergoes preliminary test operations before the first actual operation, ensuring it is ready for immediate use. The second substrate processing component can begin its test operations during the first actual operation, optimizing the timeline without adding complex coordination requirements.
Data Source
AI summary
Provided is a technique configured to cause a first actual operation to be started in a short time when the actual operation of a substrate processing component group is performed a plurality of times. A substrate processing system 10 includes a substrate processing apparatus 11 having a substrate processing component group 20 and a controller 40. The substrate processing component group 20 is configured to perform a test operation and an actual operation. The substrate processing component group 20 has a first substrate processing component and a second substrate processing component. When the actual operation is performed a plurality of times, the controller 40 causes the first substrate processing component to perform the test operation and causes the actual operation of the first substrate processing component to be started after completion of the test operation of the first substrate processing component.