Substrate Processing State Indices for Downtime Reduction
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Solution Overview
Problem
Existing state management systems for substrate processing apparatuses face challenges in efficiently monitoring and reducing downtime due to detected abnormalities, as operators need to manually identify and address issues, which is time-consuming and increases productivity losses.
Innovation Solution
A state management system that includes an acquisition unit for data collection, an execution unit for calculating specific indices such as health value, operation rate, and production rate, and a display control unit for displaying time-series data, allowing operators to easily monitor and predict the state of the apparatuses, thereby reducing downtime and improving productivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual monitoring and identification of apparatus state is used, then operators can detect abnormalities, but the process is time-consuming and increases productivity losses
Solution Approach 1:
The system enables self-service by automatically calculating and displaying the health value, operation rate, and production rate without requiring manual operator intervention. The execution unit automatically processes accumulated data to generate these indicators, and the display control unit presents them to operators, eliminating the need for manual monitoring while maintaining reliable abnormality detection.
Solution Approach 2:
The patent replaces manual mechanical monitoring processes with an automated information processing system. The execution unit uses computational methods to calculate health values and operational metrics from accumulated data, substituting manual observation and analysis with automated digital processing, thereby reducing productivity loss while maintaining detection reliability.
2Measurement precision
If multiple types of data are processed to calculate comprehensive indices, then the state monitoring becomes more accurate, but the system complexity increases
Solution Approach 1:
The execution unit merges multiple types of accumulated data to calculate comprehensive indices such as health value, operation rate, and production rate. By combining various data elements into unified indicators, the system achieves accurate state monitoring while presenting simplified information to operators through the display control unit, effectively managing the balance between measurement precision and system complexity.
Solution Approach 2:
The system transforms raw accumulated data into meaningful parameters by calculating specific indices. The execution unit changes the form of data from raw accumulated information to processed indicators like health value and operation rate, enabling accurate state assessment while maintaining manageable system complexity through standardized parameter transformations.
Data Source
AI summary
A state management system includes an acquisition unit configured to acquire cumulative data, an execution unit configured to execute, in each cycle, a processing of calculating a specific index indicating a state of the apparatus using a plurality of types of data among the acquired data, and a display control unit configured to display time-series data indicating a time-series change in the calculated specific index. The processing executed by the execution unit includes at least one of calculating a first index indicating a degree of normality of the apparatus, calculating a second index indicating a rate at which the apparatus was in the operable state, and calculating a third index indicating productivity of the apparatus. The display control unit displays the time-series data having the first index, the second index, and/or the third index as the specific index.