Step-Level Analyzer for Substrate Recipe State Deviations
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Solution Overview
Problem
Existing substrate processing systems lack the ability to effectively monitor and stabilize the processing state for each processing step in a processing recipe, leading to variations in substrate quality.
Innovation Solution
A computer program and analyzer that acquires time series data from sensors, standardizes and normalizes the data, calculates mean F-values for each processing step, and outputs the relationship between processing steps and indicator values to identify deviations and unstable processing states.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If processing state monitoring is performed using conventional methods, then overall processing stability can be maintained, but the ability to detect deviations in individual processing steps is insufficient
Solution Approach 1:
The patent segments the processing recipe into multiple discrete processing steps and calculates indicator values for each step separately. This segmentation allows precise detection of deviations in individual steps without requiring complex overall system redesign, as each step is analyzed independently using the same standardized methodology.
Solution Approach 2:
The patent introduces an intermediary analysis system that sits between the processing apparatus and the control system. This intermediary calculates indicator values by comparing measured values across substrates for each processing step, providing detailed step-level information without requiring direct modification of the existing processing apparatus or control systems.
2Manufacturing precision
If processing contents are varied for each processing step to optimize substrate quality, then substrate quality can be improved, but the processing state becomes more difficult to monitor and stabilize
Solution Approach 1:
The patent transforms diverse processing parameters into a standardized indicator value format. By calculating the variation of measured values across substrates for each processing step and expressing it as an indicator value, the system can monitor different processing steps with varying contents using a unified metric, making detection and measurement straightforward despite processing variations.
3Reliability
If data from multiple substrates are aggregated for analysis, then statistical significance of processing state evaluation is improved, but the computational complexity and data processing time increase
Solution Approach 1:
The patent performs partial action by focusing analysis on specific processing steps where deviations are suspected or most critical, rather than uniformly analyzing all steps with equal depth. The indicator value calculation uses a standardized approach that processes data efficiently by comparing measured values across substrates for each step, achieving sufficient statistical significance without excessive computational overhead.
Data Source
AI summary
Provided is a non-transitory computer-readable storage medium, an analysis method, and an analyzer that can check a processing state for each processing step in a processing recipe. A non-transitory computer-readable storage medium causes a computer to execute processing of acquiring time series data including measured values measured by a sensor provided in a processing apparatus for processing a substrate according to one or a plurality of processing steps, calculating, for each processing step, based on a plurality of pieces of the time series data acquired when substrates are processed, an indicator value indicating a deviation in measured values among the substrates in a period in which each processing step is executed, and outputting a relationship between each processing step and the indicator value.