Substrate Storage Container Posture Control Mechanism
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Solution Overview
Problem
Conventional substrate storage containers face issues where the cover plate and rotating operation portions can become obliquely pressed, leading to potential damage and dust generation, especially in large containers storing 450 mm semiconductor wafers, causing pollution and degrading the appearance.
Innovation Solution
The substrate storage container incorporates a posture control member that comes into point or line contact with the rotating operation portion to prevent incorrect posture and includes a positioning means with differently sized and curved first and second positioning members to ensure correct alignment and prevent distortion, thereby stabilizing the rotation and assembly of the lid body.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the cover plate and rotating operation portions are pressed during operation, then the locking mechanism can be actuated, but the cover plate and rotating operation portions may float up and touch causing damage or dust generation
Solution Approach 1:
A posture control member is introduced as an intermediary element between the rotating operation portion and the cover plate. This member controls the posture of the rotating operation portion during insertion and rotation, preventing it from floating up and contacting the cover plate, thereby eliminating damage and dust generation while still allowing the locking mechanism to be actuated
2Volume of moving object
If the rotating operation portion is large (for 450 mm wafer containers), then the locking mechanism can accommodate large substrates, but the floating and contact problem becomes more serious
Solution Approach 1:
The posture control member serves as a mediator that becomes increasingly important for larger containers. For 450 mm wafer containers with larger rotating operation portions, the posture control member effectively prevents the increased tendency to float and contact, allowing large substrate storage while eliminating the associated harmful effects
3Reliability
If operation keys are inserted into operation holes to rotate the locking mechanism, then the lid body can be locked, but the cover plate and rotating operation portions may be obliquely pressed causing floating
Solution Approach 1:
The posture control member provides feedback control for the rotating operation portion during the locking operation. As the operation key is inserted and rotated, the posture control member continuously maintains the correct posture of the rotating operation portion, preventing oblique pressing and floating, thereby ensuring both reliable locking and stable posture composition
Solution Approach 2:
The posture control member acts as an intermediary that mediates between the operation key insertion and the rotating operation portion rotation, ensuring stable posture throughout the locking process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively prevents damage and dust generation between the cover plate and rotating operation portions, maintains the cleanliness of semiconductor wafers, and simplifies the assembly process by ensuring accurate orientation and easy visual distinction, while also improving drainability and water removability during washing.
Implementation Method 1
the lid body is held by suction by means of lid opening/closing equipment so that the suction-held lid body is pressed to the open front of the container body
Data Source
AI summary
The substrate storage container includes: a container body for storing a semiconductor wafer; a lid body for opening and closing a front of the container body; and a locking mechanism for locking the lid body that has closed the front of the container body. The lid body is formed of a lid main body to be fitted to the front of the container body and a cover plate for covering a front face of the lid main body. The locking mechanism includes a rotating operation portion that is pivotally supported by the lid main body and rotationally operated from an outside of the cover plate. A plurality of posture control members for the rotating operation portions are provided for, at least, the cover plate, among the cover plate and the rotating operation portion.