Substrate Storage Container Vibration Damping Rails
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Solution Overview
Problem
Conventional substrate storage containers face challenges in preventing contamination and damage during conveyor transport due to abrasion between substrates and supporting ribs, and are costly and difficult to control, especially in factories with low ceilings.
Innovation Solution
A substrate storage container design featuring a conveyor contact rail with inclined projections for area contact and a position restraint member made of low-abrading material, which reduces vibrations and impacts, and allows for efficient horizontal support and precise adjustment of substrate positioning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional substrate storage containers are used during conveyor transport, then substrates can be stored and transported, but substrates and supporting ribs are rubbed against each other due to vibrations, causing substrate contamination
Solution Approach 1:
A conveyor contact rail is introduced as an intermediary component between the container and the conveyor system. This rail absorbs vibrations and mechanical shocks during transport, preventing direct transmission of vibrational energy that would cause substrates to rub against supporting ribs. The rail acts as a buffer that decouples the container from harmful vibrational forces.
Solution Approach 2:
The conveyor contact rail is designed with vibration-absorbing properties to provide beforehand cushioning against mechanical shocks and vibrations during transport. By pre-positioning this cushioning element, the system prepares for anticipated vibrations and impacts, reducing their harmful effects on substrate cleanliness before contamination can occur.
2Speed
If overhead transport systems are used, then substrates can be transported at high speeds, but the system is difficult to control, high in cost, and requires extra space in the height dimension
Solution Approach 1:
The invention adopts a simple, cost-effective conveyor transport system with contact rails as a replacement for expensive overhead transport systems. While the conveyor system may have lower speed capabilities compared to overhead systems, it provides a practical, affordable solution that works within the constraints of low-ceiling factories and reduces overall system complexity.
Solution Approach 2:
The design accepts a change in transport parameters - specifically, trading some speed for simplicity and cost-effectiveness. The conveyor system with vibration-absorbing contact rails provides adequate transport capability at reduced speeds, eliminating the need for complex overhead systems while still meeting production requirements.
3Speed
If strong impact acts on the storage container during transport, then the container can be moved, but substrates will be brought into rigorous contact with the interior, backside of the container body, resulting in damage or breakage
Solution Approach 1:
The conveyor contact rail provides beforehand cushioning by absorbing and dampening mechanical shocks and impacts during transport. This cushioning effect prevents strong impacts from being transmitted to the container body and substrates, reducing the risk of substrate damage or breakage during conveyor movement.
Solution Approach 2:
The contact rail serves as a protective intermediary between the conveyor system and the container-substrate assembly. It absorbs and dissipates impact energy before it can reach the substrates, acting as a shock absorber that protects substrate integrity during transport.
Data Source
AI summary
A substrate storage container includes: a container body of a front open box type for holding a multiple number of semiconductor wafers supported in alignment by supporting ribs; a bottom plate removably attached to the bottom of the container body; and a pair of conveyor contact rails integrally formed along both the left and right sides of this bottom plate. These conveyor contact rails inhibit vibrations and impacts acting on the semiconductor wafers when the sealed container body is conveyed by a conveyor.