Substrate Storage Container Gas Replacement Unit
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Solution Overview
Problem
Existing substrate storage containers experience variations in humidity and gas concentration when the stored state of substrates changes, leading to potential oxidation or contamination.
Innovation Solution
A substrate storage container with a front-opening box design, featuring gas replacement units that include a housing member and a cover member with strategically positioned blowout holes to evenly distribute inert gas, such as nitrogen, in multiple directions, ensuring minimal humidity and concentration variations within the internal space.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If gas is supplied through a single intake valve and hollow blowout nozzle, then the structure is simple, but variations in humidity and gas concentration increase when substrate storage state changes
Solution Approach 1:
The single blowout nozzle is divided into multiple blowout nozzles (first blowout nozzle and second blowout nozzle) positioned at different locations. Each nozzle has its own blowout holes facing different directions, creating a segmented gas distribution system that maintains consistent humidity and gas concentration even when substrate storage state changes.
Solution Approach 2:
Different regions of the container body are equipped with specialized blowout nozzles having different orientations. The first blowout nozzle has holes facing the front for uniform distribution in front substrates, while the second blowout nozzle has holes facing the rear for uniform distribution in rear substrates, ensuring local quality consistency throughout the container.
2Reliability
If multiple blowout nozzles with different orientations are used, then humidity and gas concentration consistency improves, but device complexity increases
Solution Approach 1:
Multiple blowout nozzles with different orientations are integrated into a single gas replacement unit structure. The first blowout nozzle and second blowout nozzle are combined within the same unit, sharing common components while providing differentiated gas distribution functions, thus reducing overall system complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively maintains consistent humidity and gas concentration levels, even when the storage state of substrates changes, thereby preventing oxidation and contamination.
Implementation Method 1
a gas replacement unit which blows the gas supplied from the at least one intake valve into the internal space of the container body
Implementation Method 2
strategically positioned blowout holes to evenly distribute inert gas, such as nitrogen, in multiple directions, ensuring minimal humidity and concentration variations within the internal space
Data Source
AI summary
A substrate storage container and gas replacement units are provided in which variations in humidity or concentration in an internal space are small. This is achieved by providing a container body capable of housing substrates, at least one intake valve for supplying an external gas to the internal space of the container body, and gas replacement units for blowing the supplied gas into the internal space of the container body. The container body is formed in an open front box, the intake valve is attached at the back of the bottom surface of the container, the gas replacement units each include a housing member and a cover member, each housing member has a plurality of first blowout holes for blowing the stored gas in one direction, and each cover member has a plurality of second blowout holes for blowing in a direction substantially opposite direction.