Substrate Storage Grooves for Bent Wafer Flattening

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Solution Overview

Problem

The challenge lies in effectively storing bent substrates with varying thicknesses, as the reduction in thickness due to backside etching disrupts the stress balance, causing them to bend, and existing storage apparatus struggle to maintain spacing between multiple substrates while supporting their edges and centers.

Innovation Solution

The substrate storage apparatus features a main body with pads having grooves of specific orientations to support the edges and center of bent substrates, allowing for secure storage by applying stress to flatten the substrates, and an optional storage cover with a rectangular supporting groove to prevent escape and external damage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If substrates are stored by holding edges with grooves, then substrates are spaced from one another, but bent substrates cannot be properly supported and may escape or be damaged

Engineering Contradiction:

Improvesubstrate storage stabilityVSAvoidcompatibility with bent substrates

Core Design Contradiction:

ReliabilityVSAdaptability or versatility

Solution Approach 1:

The storage apparatus divides the support function into multiple segments: first grooves support one edge, second grooves support the center, and third grooves support the other edge. This segmentation allows each groove type to be optimized for its specific support location, enabling reliable storage of bent substrates while maintaining substrate spacing

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different groove configurations are applied to different locations on the substrate. First grooves have a first configuration suitable for edge support, second grooves have a second configuration optimized for center support, and third grooves have a third configuration for opposite edge support. This local quality adaptation enables the apparatus to handle bent substrates effectively

Inventive Principle:

Principle #3Local quality

2Quantity of substance

If multiple substrates are stored in the main body, then storage capacity is improved, but maintaining proper spacing and preventing escape becomes difficult

Engineering Contradiction:

Improvenumber of stored substratesVSAvoidsubstrate containment and spacing

Core Design Contradiction:

Quantity of substanceVSReliability

Solution Approach 1:

The second grooves act as intermediary support elements positioned between the first and third grooves. These second grooves provide additional support at the substrate center, preventing substrates from escaping laterally while maintaining proper spacing between multiple stored substrates

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The support system transitions from simple edge-only support to a three-point support system involving edges and center. This dimensional expansion of support points creates a more reliable containment structure that prevents substrate escape while accommodating multiple substrates

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Data Source

PatentUS9184075B2Apparatus for storing substrates

Publication Date: 2015.11.10 SAMSUNG DISPLAY CO LTD

AI summary

An apparatus for storing a substrate on which a pattern is formed includes a main body storing the substrate, a first pad located at the bottom of the main body and including a first groove supporting one edge of the substrate, a second pad neighboring the first pad and including a second groove supporting the center of the substrate, and a third pad spaced from the first pad, the second pad being disposed between the first and third pads, the third pad including a third groove supporting the other edge of the substrate.