Substrate Support Refurbishment by Backside Coating Thickness Recovery

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Solution Overview

Problem

Existing methods for refurbishing substrate supports in lithographic apparatuses result in a reduction of thickness, leading to compatibility issues after multiple refurbishments, ultimately requiring the substrate support to be discarded.

Innovation Solution

A method involving the deposition of a material on the second surface to form a coating layer, increasing the substrate support's thickness, while simultaneously removing material from the first surface, thereby restoring and maintaining the substrate support's thickness and usability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If material is removed from the first surface to restore flatness and remove worn material, then the flatness and surface quality are improved, but the thickness of the substrate support is reduced

Engineering Contradiction:

Improveflatness of first surfaceVSAvoidthickness of substrate support

Core Design Contradiction:

Manufacturing precisionVSLength of stationary object

Solution Approach 1:

Instead of depositing material on the first surface (which has stringent flatness requirements), the invention inverts the approach by depositing material on the second surface. This compensates for thickness loss without compromising the flatness of the first surface, which remains the critical functional surface for substrate support.

Inventive Principle:

Principle #13The other way round (Inversion)

Solution Approach 2:

The invention addresses the thickness reduction problem by operating in a different dimension - rather than adding material to the first surface (same dimension as the problem), material is added to the second surface (opposite dimension), thereby restoring overall thickness while preserving first surface flatness.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Duration of action of stationary object

If multiple refurbishments are performed to extend the lifespan of the substrate support, then the duration of use is improved, but the thickness of the substrate support is progressively reduced

Engineering Contradiction:

Improvelifespan of substrate supportVSAvoidthickness of substrate support

Core Design Contradiction:

Duration of action of stationary objectVSLength of stationary object

Solution Approach 1:

The invention performs preliminary compensation by depositing material on the second surface before the substrate support becomes too thin. This proactive thickness restoration enables additional refurbishment cycles, extending the overall lifespan of the substrate support beyond what would be possible with traditional methods alone.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The invention recovers the substrate support from what would otherwise be a discardable state by restoring its thickness. By depositing material on the second surface, the substrate support is recovered and returned to service, extending its operational life and reducing waste.

Inventive Principle:

Principle #34Discarding and recovering

3Length of stationary object

If material is deposited on the first surface to restore thickness, then the thickness is improved, but the surface flatness and finish are compromised

Engineering Contradiction:

Improvethickness of substrate supportVSAvoidsurface flatness of first surface

Core Design Contradiction:

Length of stationary objectVSManufacturing precision

Solution Approach 1:

The invention inverts the conventional approach by depositing material on the second surface instead of the first surface. This ensures that the first surface, which requires high flatness and finish quality, is not subjected to deposition processes that would compromise its precision.

Inventive Principle:

Principle #13The other way round (Inversion)

Solution Approach 2:

The invention applies local quality by treating the two surfaces differently - the first surface maintains its high precision requirements through material removal only, while the second surface receives material deposition to compensate for thickness loss. Each surface receives the treatment appropriate to its functional requirements.

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method effectively compensates for material removal from the first surface by adding a coating layer on the second surface, extending the lifespan of the substrate support and preventing premature discarding due to thickness reduction.

Implementation Method 1

depositing a material on the second surface to form a coating layer which increases a thickness of the substrate support

Methodology Applied

Scientific EffectPhysical vapour deposition: Physical Vapour Deposition

Data Source

PatentEP4535083A1A method of refurbishing a substrate support

Publication Date: 2025.04.09 ASML NETHERLANDS BV

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AI summary

A method of refurbishing a substrate support, the substrate support comprising: a first surface, configured to support a substrate; and a second surface, opposite to the first surface. The method comprises: depositing a material on the second surface to form a coating layer which increases a thickness of the substrate support; and removing material from the first surface.