Substrate Support Control for Wear-Compensated Clamping Accuracy
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Solution Overview
Problem
Conventional substrate supporting apparatuses experience displacement of the substrate due to wear-out of supporting members, leading to deviations in clamping pressure and potential misalignment during substrate processing, such as cleaning and polishing.
Innovation Solution
A substrate supporting apparatus with a pair of driven members and a connecting member that adjusts the distance between them linearly, allowing for precise control of the clamping position and minimizing displacement, even with worn-out supporting members, using a driving device and detection systems to maintain consistent force and torque within specified ranges.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If supporting members are used to contact and rotate the substrate, then the substrate can be processed, but the supporting members wear out causing displacement of the substrate supporting position
Solution Approach 1:
A detection device detects the actual position of the substrate supporting position, and a control device adjusts the connecting member's position based on the detection result to compensate for wear-induced displacement, maintaining positioning accuracy throughout the supporting members' service life
Solution Approach 2:
The position parameter of the connecting member is dynamically adjusted based on detected substrate position deviations caused by supporting member wear, compensating for dimensional changes and maintaining precision
2Reliability
If clamping pressure is adjusted using a load-cell jig at shipment or delivery, then the substrate can be supported at the correct pressure, but repeated use causes deviation of the pressure
Solution Approach 1:
A detection device continuously monitors the actual clamping pressure on the substrate, and a control device adjusts the connecting member position based on detection results to maintain pressure within the specified range, eliminating the need for repeated manual adjustments
Solution Approach 2:
The system automatically monitors and adjusts clamping pressure through the detection device and control device, maintaining proper pressure without requiring external intervention or manual recalibration during operation
3Manufacturing precision
If the distance between driven members is adjusted to compensate for supporting member wear, then substrate positioning accuracy can be maintained, but the device complexity increases
Solution Approach 1:
The connecting member serves multiple functions: it transmits driving force to rotate the substrate, positions the supporting members, and acts as an adjustable element for compensating wear-induced displacement, reducing the need for separate adjustment mechanisms
Solution Approach 2:
The connecting member's position is dynamically adjustable during operation, allowing the system to adapt to supporting member wear while maintaining positioning accuracy through controlled movement along the first direction
Data Source
AI summary
Exemplary substrate supporting apparatus and method for attaching and/or detaching substrate are provided. In one aspect, substrate supporting apparatus has a plurality of supporting members 10 that contacts a circumferential part of a substrate W and rotate the substrate W; a pair of driven members 30 on which the plurality of supporting members 10 are provided; a connecting member 20 connecting one driven member 31 and another driven member 32; and a driving device 40 that brings the pair of driven members 30 close to each other or separates the pair of driven members 30 from each other, linearly along a first direction, by moving at least a part of the connecting member 20. Numerous other aspects are provided.