Substrate Support Member Cleaning in Atmosphere Conveyance

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Solution Overview

Problem

Existing substrate conveyance devices lack effective methods for cleaning the support members that hold substrates during conveyance, leading to potential contamination and inefficiencies.

Innovation Solution

A processing system is introduced that includes an atmosphere conveyance module, a conveyance device with end effectors, and a cleaning device, which can clean the support members using air blowing, polishing, and imaging to maintain substrate cleanliness.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If substrate conveyance is performed using support members in a conveyance device, then substrate handling capability is improved, but contamination of support members occurs leading to substrate quality degradation

Engineering Contradiction:

Improvesubstrate handling capabilityVSAvoidcontamination of support members

Core Design Contradiction:

ProductivityVSObject-affected harmful factors

Solution Approach 1:

The cleaning device performs preliminary cleaning of support members before substrates are mounted onto them. The atmosphere conveyance module conveys cleaned support members in a controlled atmosphere to prevent contamination during storage and handling, ensuring substrates are placed on clean surfaces from the outset

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

A controlled atmosphere environment acts as an intermediary between the external contaminated environment and the support members. The atmosphere conveyance module creates and maintains this protective atmosphere, preventing direct contact between support members and contaminants while enabling substrate handling operations

Inventive Principle:

Principle #24Intermediary (Mediator)

2Reliability

If cleaning operations are added to the conveyance system, then support member cleanliness is improved, but system complexity increases

Engineering Contradiction:

Improvesupport member cleanlinessVSAvoidsystem complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The cleaning device is merged with the conveyance device to form an integrated system. The atmosphere conveyance module combines substrate conveyance and support member cleaning functions within a single system architecture, reducing the number of separate equipment pieces and simplifying overall system operation

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The conveyance device is designed with multi-functionality, serving both as a substrate transport mechanism and as a platform for support member cleaning operations. The atmosphere conveyance module performs multiple functions including conveying substrates, conveying support members, and maintaining cleaning atmosphere, reducing the need for dedicated separate equipment

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system effectively cleans and maintains the integrity of support members, ensuring reliable substrate handling and processing by removing contaminants and adjusting for positional deviations.

Implementation Method 1

cleaning device cleans the at least one support member

Methodology Applied

Scientific EffectAir blowing:

Data Source

PatentUS20260027596A1Processing system

Publication Date: 2026.01.29 TOKYO ELECTRON LTD

AI summary

A processing system disclosed includes an atmosphere conveyance module, a conveyance device, and a cleaning device. The atmosphere conveyance module is capable of conveying a substrate in an atmosphere. The conveyance device includes an end effector including at least one support member on which the substrate is to be mounted. The conveyance device is provided in the atmosphere conveyance module and may convey the substrate. The cleaning device cleans the at least one support member.