Substrate Support Connector Retainer for Thermal-Stress Reliability
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Solution Overview
Problem
Soldered connections between temperature sensors and a temperature controller in substrate processing systems often fail due to thermal stress, leading to disconnection and requiring replacement of the entire substrate support and controller.
Innovation Solution
A substrate support with embedded temperature sensors and heating elements, where electrical conductors are reflow soldered to conductive pads and secured with a retainer made of materials like epoxy, silicone, or ceramic, and potting material is used to maintain electrical connections through a through hole, ensuring reliable communication with the temperature controller.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If soldered connections are used between temperature sensors and temperature controller, then electrical connection is established, but the connection fails due to thermal stress
Solution Approach 1:
The patent introduces a retainer component as an intermediary element between the temperature sensor and the temperature controller. This retainer provides a mechanical support structure that holds the soldered connection, distributing the thermal stress and preventing direct transmission of stress to the solder joint. The retainer acts as a buffer zone that absorbs thermal expansion and contraction forces, thereby protecting the electrical connection from failure.
Solution Approach 2:
The patent employs a composite structure combining multiple materials with different thermal properties. The retainer is made of a material that can withstand thermal stress, while the solder joint uses materials optimized for electrical conductivity and thermal resistance. This composite approach allows each material to perform its optimal function - the retainer handles mechanical and thermal stress, while the solder provides reliable electrical connection - thereby resolving the contradiction between connection reliability and lifespan under thermal stress conditions.
2Measurement precision
If temperature sensors are embedded in ceramic substrate support, then temperature monitoring is achieved, but connection stability deteriorates under thermal stress
Solution Approach 1:
The patent segments the temperature sensing system into distinct functional components: the embedded temperature sensor in the ceramic substrate support for accurate measurement, the retainer as a separate mechanical support structure for stability, and the electrical connection components. This segmentation allows each component to be optimized for its specific function - the sensor for measurement precision and the retainer for connection stability - while working together as an integrated system.
Solution Approach 2:
The retainer serves as an intermediary component between the embedded temperature sensor and the external temperature controller. It provides a stable mechanical platform that protects the sensor connections from thermal stress while allowing the sensor to remain embedded in the ceramic substrate for accurate temperature monitoring. This intermediary structure resolves the contradiction by decoupling the measurement function from the connection stability requirement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a reliable and durable electrical connection between temperature sensors and the temperature controller, reducing the risk of disconnection and extending the lifespan of the substrate support and controller by withstanding thermal stress.
Implementation Method 1
A connector extends through the through hole and that includes: a retainer; and electrical conductors that are held by the retainer
Implementation Method 2
the first ends are electrically connected to the electrically conductive pads, respectively, via reflow soldering
Implementation Method 3
an adhesive adheres the electrical conductors to at least one of the first, second, and third cylindrical discs
Data Source
AI summary
An electrical connector includes first, second, third, and fourth electrical conductors. The first, second, third, and fourth electrical conductors each include a first end to be electrically connected to a respective electrically conductive pad formed on a surface of a ceramic layer of a substrate support and a second end to be electrically connected to a respective wire within a through hole in the substrate support. The electrical connector also includes a retainer to hold the first, second, third, and fourth electrical conductors in place.