Refrigerant Flow Reversal for Substrate Support Temperature Uniformity
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Solution Overview
Problem
In semiconductor manufacturing, achieving uniform temperature control across the substrate support is challenging due to non-uniform heat distribution caused by refrigerant flow in the substrate support's refrigerant passage, leading to temperature differences between the supply and discharge positions, which complicates temperature control during processes like film formation and plasma processing.
Innovation Solution
A substrate support with a refrigerant passage that reverses the flow direction periodically to maintain uniform heat exchange, using a control unit to manage the flow direction and heaters to adjust temperature, ensuring consistent temperature across the substrate support.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Use of energy by moving object
If refrigerant flows through the refrigerant passage in a fixed direction, then heat exchange efficiency is improved, but temperature uniformity across the substrate support deteriorates due to temperature differences between supply and discharge positions
Solution Approach 1:
The refrigerant flow direction is periodically reversed using a switching mechanism that alternates between first and second discharge paths. This periodic reversal prevents temperature accumulation at fixed discharge positions, thereby maintaining temperature uniformity across the substrate support while preserving heat exchange efficiency through continuous refrigerant circulation.
Solution Approach 2:
The system transitions from a static refrigerant flow configuration to a dynamic one where the discharge position changes over time. The switching mechanism dynamically adjusts the refrigerant flow path based on temperature conditions, allowing the system to adapt and maintain uniform temperature distribution while preserving effective heat exchange.
2Temperature
If refrigerant flow direction is reversed frequently, then temperature uniformity is improved, but system complexity increases due to switching mechanism
Solution Approach 1:
The refrigerant discharge path is segmented into multiple independent paths (first discharge path and second discharge path). The switching mechanism selectively activates one path at a time, simplifying the control logic compared to a fully complex reversible system. This segmentation allows temperature uniformity improvement while keeping the switching mechanism relatively simple and manageable.
3Measurement precision
If refrigerant flow rate is increased to improve cooling efficiency, then temperature control precision is improved, but temperature uniformity deteriorates due to excessive cooling at supply position
Solution Approach 1:
By periodically reversing the refrigerant flow direction, the system distributes the intense cooling effect to different locations over time. This prevents localized over-cooling at the supply position while maintaining overall temperature control precision. The periodic action ensures that no single location experiences continuous high-rate cooling, thereby preserving temperature uniformity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances in-plane temperature uniformity and improves temperature control by maintaining a consistent heat exchange margin, allowing for precise temperature adjustments even during high-energy plasma processing, thereby preventing temperature control difficulties.
Implementation Method 1
a refrigerant passage provided in the main body and configured to take heat from the main body by a refrigerant
Implementation Method 2
receives a heat input from at least an outside of the substrate support
Data Source
AI summary
A substrate support is provided. The substrate support includes a main body of the substrate support that receives a heat input from at least an outside of the substrate support, a refrigerant passage provided in the main body and configured to take heat from the main body by a refrigerant, a switching mechanism that switches a position where the refrigerant is supplied to the refrigerant passage and a position where the refrigerant is discharged from the refrigerant passage between one end and the other end of the refrigerant passage in order to reverse a direction in which the refrigerant flows in the refrigerant passage, and a control unit. The control unit is configured to control the switching mechanism so as to repeatedly reverse the direction in which the refrigerant flows during a period in which the main body receives the heat input.