Substrate Support Assembly With Fluorine-Resistant Edge Ring

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Solution Overview

Problem

Fluorine radicals used in PECVD cleaning processes oxidize aluminum components, leading to degradation and cracking of ceramic coatings, which results in contamination and reduced equipment longevity.

Innovation Solution

A substrate support assembly with a support protrusion, edge recess, and removably coupled edge ring or support ring, made of materials resistant to fluorine, protects the support body from oxidation and extends the lifetime of the assembly.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If ceramic coatings are used to protect aluminum from fluorine radical attack, then protection against oxidation is improved, but the coatings crack and degrade over time due to plasma exposure

Engineering Contradiction:

Improveprotection against oxidationVSAvoidcoating lifespan

Core Design Contradiction:

ReliabilityVSDuration of action of stationary object

Solution Approach 1:

The patent removes the ceramic coating layer entirely and replaces it with a fluorine-resistant material such as silicon nitride or silicon oxide. This extraction of the problematic coating allows the aluminum substrate to be directly protected by a more durable, fluorine-resistant material that does not crack under plasma exposure, thereby resolving the contradiction between oxidation protection and coating lifespan.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The patent employs composite material structures where fluorine-resistant materials (silicon nitride, silicon oxide) are applied to the aluminum substrate. These composite materials combine the benefits of fluorine resistance with structural integrity, eliminating the cracking issue while maintaining protection against oxidation and plasma damage.

Inventive Principle:

Principle #40Composite materials

2Productivity

If fluorine radicals are used for cleaning, then contaminant removal is improved, but oxidation of aluminum components occurs

Engineering Contradiction:

Improvecleaning efficiencyVSAvoidoxidation damage

Core Design Contradiction:

ProductivityVSObject-affected harmful factors

Solution Approach 1:

The patent converts the harmful effect of fluorine radicals into a beneficial process by using fluorine-containing gases (such as SF6 or CF4) in a controlled plasma environment. The fluorine radicals continue to effectively remove contaminants from substrates while the aluminum components are protected by fluorine-resistant coatings or alternative materials, thus maintaining cleaning efficiency while eliminating oxidation damage.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The patent creates a protective environment around the aluminum components using fluorine-resistant materials that form a barrier layer. This inert-like protection allows the aggressive fluorine radicals to perform cleaning functions in the chamber while the protected components remain unaffected by the harmful oxidation, effectively isolating the harmful factor from the vulnerable material.

Inventive Principle:

Principle #39Inert atmosphere (Inert environment)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The assembly effectively prevents oxidation of aluminum components, reducing maintenance costs and ensuring consistent substrate support during high-temperature cleaning processes.

Implementation Method 1

an edge ring having an edge support surface and disposed on and removably coupled to the top surface of the support body, the edge ring being partially disposed in the edge recess

Methodology Applied

Scientific EffectPhysical barrier protection:

Implementation Method 2

an inner heating element embedded in the support body, and an outer heating element embedded in the support body

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS20250361614A1Increased life substrate support assembly

Publication Date: 2025.11.27 APPLIED MATERIALS INC

AI summary

Embodiments herein are generally directed to a substrate support assembly for use in a plasma processing chamber. The substrate support assembly includes a support body, a support protrusion having a substrate support surface and extending from a top surface of the support body, an edge recess disposed along an outer edge of the support body, and an edge ring having an edge support surface and disposed on and removably coupled to the top surface of the support body, the edge ring being partially disposed in the edge recess. In another embodiment, a support ring is disposed on the top surface between the edge ring and the support protrusion. In yet another embodiment, an inner heating element and an outer heating element is embedded in the support body.