Substrate Support Heating Unit with Independent Region Control
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Solution Overview
Problem
Existing substrate treatment processes face challenges in uniformly controlling the temperature of substrates during manufacturing, particularly in semiconductor device production, due to the need for multiple heating units and terminals, which can lead to inconsistent temperature control across different regions.
Innovation Solution
A substrate treatment apparatus with a supporting unit featuring a body with multiple heating regions, each equipped with independent heating lines, terminals, and connecting lines to receive external power, allowing precise temperature control of each region, and optionally incorporating a cooling flow channel to manage heat distribution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If multiple heating units are provided for each heating region, then temperature control for each region is improved, but device complexity increases due to multiple terminals and power distribution requirements
Solution Approach 1:
Multiple heating units that were previously distributed across different locations are merged into a single integrated heating unit. This heating unit includes multiple heating regions with independent heating lines, allowing each region to be controlled separately while using a unified terminal structure, thereby reducing the number of terminals from multiple separate terminals to a single terminal assembly.
Solution Approach 2:
The single terminal assembly serves multiple functions by providing power to all heating regions simultaneously. The terminal is designed to distribute power to different heating lines within the heating unit, making it a universal power distribution point that replaces the need for multiple separate terminals while maintaining independent control capability.
2Use of energy by moving object
If terminals are distributed across multiple locations corresponding to heating regions, then power distribution is improved, but temperature uniformity deteriorates due to heat generation at terminal locations
Solution Approach 1:
All terminal functions are merged into a single location rather than being distributed across multiple heating regions. This consolidation eliminates the heat generation problem at distributed terminal locations while maintaining efficient power distribution through the integrated terminal's internal connectivity to all heating regions.
Solution Approach 2:
The heating lines act as intermediaries that transmit power from the single terminal to various heating regions. This intermediary structure allows power distribution without requiring physical terminals at each heating region, thereby preventing localized heat generation at terminal points while maintaining power delivery efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables precise and uniform temperature control of substrates during treatment processes, enhancing the consistency and efficiency of semiconductor manufacturing by allowing independent control of heating regions and effective heat management.
Implementation Method 1
a heating unit heating the body... the heating unit includes heating lines provided in the plurality of heating regions, respectively
Implementation Method 2
the body may further include a cooling flow channel for cooling down the body
Data Source
AI summary
Provided is a supporting unit supporting a substrate. The supporting unit includes a body including a plurality of heating regions and disposed with the substrate on a top surface thereof and a heating unit heating the body. Herein, the heating unit includes heating lines provided in the plurality of heating regions, respectively, to control temperatures of the plurality of heating regions independently from one another, terminals provided to the body and receiving power from the outside, and connecting lines connecting the heating lines to the terminals mutually corresponding to one another. Also, the terminals are disposed in one of the plurality of heating regions in a top view.