Substrate Support Structure for Clear Overhead Processing Space
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Solution Overview
Problem
Existing substrate processing apparatuses are limited by the space above the substrate center due to the support member, restricting its utilization for various purposes.
Innovation Solution
A substrate processing apparatus with a support part and a placement member that can be moved up and down using a simple structure, allowing the space above the substrate to be utilized for multiple functions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a member covering above the substrate is placed on a support part for supporting the substrate, then the space above the substrate can be used for various purposes, but the structure becomes more complex
Solution Approach 1:
The support part is divided into a stationary support base and a movable placement member that can be separated. The placement member is detachably coupled to the support part through contact parts, allowing independent movement and positioning. This segmentation enables the placement member to be moved up and down without moving the entire support structure, simplifying the overall system while enabling versatile space utilization above the substrate.
Solution Approach 2:
The placement member is designed to be movable in the up-and-down direction relative to the support part through the contact part mechanism. This dynamic capability allows the placement member to be positioned at different heights, enabling various uses of the space above the substrate while maintaining a compact structure when not in use.
2Adaptability or versatility
If a member is placed on a support part and moved up and down, then the space above the substrate becomes accessible, but the support structure requires additional moving mechanisms
Solution Approach 1:
The moving capability is extracted from the main support structure and assigned to the placement member through simple contact parts. The up-and-down move driving part only needs to move the second contact part, which then transfers motion to the placement member through contact with the first contact part. This extraction simplifies the driving mechanism compared to moving the entire support structure.
Solution Approach 2:
The contact parts serve as intermediaries between the driving mechanism and the placement member. The second contact part of the driving mechanism contacts the first contact part of the placement member to transmit motion, acting as a simple mechanical intermediary that enables movement without complex linkages or direct coupling.
3Length of stationary object
If the placement member is moved up and down with a simple structure, then the apparatus height is reduced, but the moving mechanism must be compact
Solution Approach 1:
The contact parts are positioned such that the second contact part can be nested within or adjacent to the first contact part when not in use. The driving mechanism's second contact part extends toward the first contact part from an outward portion in the radial direction, allowing compact arrangement that minimizes the vertical space required for the moving mechanism.
Data Source
AI summary
In a substrate processing apparatus for supplying a processing liquid onto a substrate being rotated, to thereby process the substrate, an upper support body which is a placement member is separably placed on a lower support body for supporting the substrate. The upper support body is moved up and down by an up-and-down moving part. The upper support body includes a first contact part outside an outer periphery of the substrate in a radial direction. When a second contact part of the up-and-down moving part goes up, the second contact part comes into contact with the first contact part, to thereby move the upper support body up. When the second contact part goes down, the upper support body is placed on the lower support body and the second contact part is separated from the first contact part, and in this state, the lower support body is rotatable.