Substrate Support Protrusion for Independent Heating Zones
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Solution Overview
Problem
Existing substrate treating apparatuses face limitations in subdividing heating regions due to space constraints, which restricts the independent control of temperature in multiple areas, affecting process efficiency and temperature uniformity during plasma-based treatments.
Innovation Solution
A substrate treating apparatus with a support unit that includes a heating member with multiple heaters and a protrusion to partition the substrate into multiple gas regions, allowing independent heating and heat transfer gas supply to each region, enabling precise temperature control through adjustable flow rates and pressures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the number of heating regions is increased to improve temperature control precision, then manufacturing precision is improved, but device complexity increases due to additional heater terminals and temperature sensors
Solution Approach 1:
The support member is divided into multiple independent heating regions, each with its own heater terminal. This segmentation allows independent temperature control of different substrate regions without requiring complex additional components, as each region is self-contained with dedicated heating elements integrated into the support member structure
Solution Approach 2:
The support member serves multiple functions simultaneously: it provides mechanical support for the substrate, integrates heating elements for temperature control, and acts as a structural platform. This multi-functionality reduces the need for separate dedicated components for each function, thereby reducing overall device complexity while maintaining precise temperature control capability
2Manufacturing precision
If the number of heating regions is increased to improve temperature uniformity, then manufacturing precision is improved, but the available space in the substrate treating apparatus is exhausted
Solution Approach 1:
The heating elements are merged with the support member structure itself, forming an integrated assembly. This combination eliminates the need for separate heating components that would occupy additional space, allowing multiple heating regions to be implemented within the existing apparatus footprint without increasing the overall space requirement
Solution Approach 2:
The heating regions are arranged in a planar distribution pattern on the support member surface, utilizing two-dimensional space efficiently. This dimensional arrangement allows multiple heating zones to coexist within the limited space by optimizing the spatial layout of heating elements across the support member area rather than stacking them vertically
3Productivity
If the heating regions are subdivided to improve process efficiency, then productivity is improved, but the space for arranging components is reduced
Solution Approach 1:
The support member is segmented into multiple independent heating regions with dedicated heater terminals, enabling simultaneous independent temperature control of different substrate areas. This segmentation allows parallel processing of different regions, improving process efficiency without requiring additional external control systems that would consume space
Solution Approach 2:
The heating elements are nested within or integrated into the support member structure, with heater terminals positioned within the support member body. This nested arrangement allows multiple heating regions to be compactly organized within the available space, maximizing component density while maintaining access for connections and operations
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances process efficiency by allowing for more precise temperature control and reduced temperature deviations across the substrate, improving the effectiveness of plasma-based treatments by subdividing heating regions without increasing the number of heater terminals or space requirements.
Implementation Method 1
Plasma is generated by heating a neutral gas to a very high temperature or subjecting it to a strong electric field or a radio frequency (RF) electromagnetic field
Implementation Method 2
subjecting it to a strong electric field or a radio frequency (RF) electromagnetic field
Implementation Method 3
a heating member that heats the substrate supported on the support member
Implementation Method 4
a heat transfer gas supply member that supplies a heat transfer gas to a backside of the substrate
Implementation Method 5
supplies a heat transfer gas to a backside of the substrate
Data Source
AI summary
An apparatus comprises a housing having a process space, a support unit supporting the substrate in the process space, a process gas supply unit supplying a process gas into the process space, and a plasma source generating plasma from the process gas. The support unit comprises a support member on which the substrate is placed, a heating member that heats the substrate supported on the support member, and a heat transfer gas supply member that supplies a heat transfer gas to a backside of the substrate. The heating member comprises heaters that heat regions on the substrate on the support member viewed from above. The support member comprises a protrusion that partitions a space between the support member and the backside of the substrate placed on the support member into gas regions, and at least one of heating regions is divided into regions by the protrusion viewed from above.