Gas-Rotated Substrate Support With Pyrometer Speed Detection

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Solution Overview

Problem

In reaction chambers with gas flow rotation, particularly in 'hot-wall' chambers, estimating the rotation speed of substrate support devices with high precision is challenging due to factors like deposits on the device and positioning changes, especially at high temperatures.

Innovation Solution

The use of an optical-thermal device, such as a pyrometer, to detect the periodic temperature variations caused by the rotation of a substrate support device, allowing for the calculation of rotation speed based on the period of these variations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If gas flow rotation is used to rotate the substrate support device, then the device complexity is reduced and ease of operation is improved, but the measurement precision of rotation speed deteriorates

Engineering Contradiction:

Improverotation mechanism complexityVSAvoidrotation speed measurement precision

Core Design Contradiction:

Device complexityVSMeasurement precision

Solution Approach 1:

The patent replaces mechanical rotation measurement systems with optical detection. A pyrometer or optical sensor detects temperature variations or reflective properties of the rotating substrate support device, converting mechanical rotation into optical signals for precise non-contact measurement of rotation speed.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces an intermediary detection system (pyrometer or optical sensor) that indirectly measures rotation speed by detecting temperature variations or optical properties of the rotating device, rather than directly measuring mechanical rotation parameters.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Measurement precision

If mechanical rotation is used to rotate the substrate support device, then the measurement precision of rotation speed is improved, but the device complexity and ease of manufacture worsen

Engineering Contradiction:

Improverotation speed measurement precisionVSAvoidrotation mechanism complexity

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The patent replaces complex mechanical rotation drive systems with simpler gas flow-driven rotation, while using optical detection systems to maintain precise measurement of rotation speed without mechanical coupling.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The substrate support device rotates itself under the action of gas flow without external mechanical drive, eliminating the need for complex mechanical transmission systems while maintaining controllable rotation through gas flow parameters.

Inventive Principle:

Principle #25Self-service

3Ease of operation

If gas flow rotation is used in hot-wall reaction chambers, then the ease of operation is improved, but the reliability of rotation speed estimation deteriorates due to deposits and positioning changes

Engineering Contradiction:

Improveoperation simplicityVSAvoidrotation speed estimation reliability

Core Design Contradiction:

Ease of operationVSReliability

Solution Approach 1:

The patent uses optical detection systems (pyrometers) that are not affected by deposits on the substrate support device, providing reliable rotation speed measurement through non-contact temperature or optical property detection that remains accurate despite chamber conditions.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent implements feedback control by continuously monitoring rotation speed through optical detection and adjusting gas flow parameters to maintain desired rotation speed, compensating for variations caused by deposits or positioning changes.

Inventive Principle:

Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enables precise determination of the rotation speed of substrate support devices in high-temperature environments, improving the uniformity of semiconductor material deposition.

Implementation Method 1

the use of an optical-thermal device, such as a pyrometer, to detect the periodic temperature variations caused by the rotation of a substrate support device

Methodology Applied

Scientific EffectThermal radiation detection: Thermal Radiation

Implementation Method 2

a disc-shaped element adapted to receive a gas flow to rotate about an axis

Methodology Applied

Scientific EffectFluid dynamic force: Fluid Spray

Data Source

PatentUS20250140597A1Substrate support device for a reaction chamber of an epitaxial reactor with gas flow rotation, reaction chamber and epitaxial reactor

Publication Date: 2025.05.01 LPE SPA

AI summary

The device (420) is for supporting substrates in a reaction chamber of an epitaxial reactor; it comprises: a disc-shaped element (422) having a first face (422A) adapted to be upperly positioned when the device (420) is being used and a second face (422B) adapted to be lowerly positioned when the device (420) is being used, said disc-shaped element (422) being adapted to receive a gas flow (F) to rotate the device (420) about an axis (X) thereof, a substrate-supporting element (424) in a single piece with said disc-shaped element (422) and preferably adjacent to said first face (422A), and a shaft (426) coaxial to said disc-shaped element (422), in a single piece with said disc-shaped element (422) and having a first end (426A) at said second face (422B); said shaft (426) has at a second end (426B) thereof at least a protrusion (428A, 428B, 428C) whose rotation is adapted to be detected by a pyrometer (430) or a thermographic camera.