Substrate Support Ring Layout for Shared Plasma Ring Replacement
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Solution Overview
Problem
The cost of maintaining plasma processing apparatuses increases due to the need for separate lifters to replace consumable rings, such as edge and outer rings, which are consumed during plasma processing.
Innovation Solution
A substrate support design that allows two types of rings to be replaced using a common lifter, utilizing a transfer ring to support both the edge and outer rings, with specific engaging portions for the lifter to facilitate simultaneous replacement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If separate lifters are used to replace edge rings and outer rings, then each ring can be replaced independently, but the cost of maintaining the plasma processing apparatus increases
Solution Approach 1:
The lifter is designed with dual functionality to replace both edge rings and outer rings. The lifter includes a first engaging portion that engages with the edge ring and a second engaging portion that engages with the outer ring, allowing a single lifter to perform multiple replacement tasks that previously required separate devices.
Solution Approach 2:
The patent combines the edge ring replacement function and outer ring replacement function into a single integrated lifter device. By merging these two separate replacement capabilities into one device, the total number of lifters is reduced while maintaining the ability to replace both ring types independently when needed.
2Ease of operation
If multiple separate lifters are used, then each consumable ring can be replaced with dedicated equipment, but the device complexity increases
Solution Approach 1:
The lifter incorporates multiple engaging portions with different configurations to handle different ring types. The first engaging portion is designed for edge ring engagement while the second engaging portion is designed for outer ring engagement, allowing one device to replace what previously required multiple specialized devices.
Solution Approach 2:
The lifter is segmented into distinct engaging portions, each optimized for specific ring types. This segmentation within a unified structure allows the device to maintain specialized functionality for different rings while avoiding the complexity of having entirely separate replacement devices.
3Manufacturing precision
If separate lifters are used for different rings, then each ring replacement can be precisely controlled, but the maintenance cost increases
Solution Approach 1:
The lifter's multiple engaging portions are each designed with precise geometries tailored to specific ring types. The first engaging portion provides precise control for edge ring replacement while the second engaging portion provides precise control for outer ring replacement, all within a single device.
Data Source
AI summary
There is a substrate support comprising: a substrate supporting portion; a first ring disposed to surround the substrate supporting portion; a second ring surrounding the first ring without overlapping the first ring in plan view; a third ring disposed below the first ring and the second ring such that an inner portion of the third ring overlaps the first ring in plan view and an outer portion of the third ring overlaps the second ring in plan view, and having a hole at the inner portion of the third ring; a lifter having a first engaging portion protruding upward from the hole of the third ring and engaged with the first ring and a second engaging portion disposed below the first engaging portion and engaged with the third ring; and an actuator configured to raise and lower the lifter.