Adjustable Substrate Support Layout for OLED Sagging Control
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Solution Overview
Problem
Large substrates used in OLED manufacturing sag due to their weight, leading to uneven deposition of organic materials and increased defect rates, which in turn raises production energy costs.
Innovation Solution
A substrate support apparatus with position adjusters and supports that can be raised to evenly distribute the weight of large substrates, minimizing sagging and ensuring uniform deposition by adjusting the position of supports relative to the substrate during the manufacturing process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the substrate size is enlarged to meet display apparatus requirements, then the display area is increased, but the substrate sags due to its own weight
Solution Approach 1:
The substrate support system is segmented into multiple independent support points (first support, second support, third support, fourth support) distributed across the substrate surface. Each support point can be independently adjusted to provide localized support, preventing overall substrate sagging while maintaining large substrate area.
Solution Approach 2:
The position adjusters are configured to preliminarily support the substrate at specific positions before the complete deposition process begins. This preliminary positioning prevents sagging during the manufacturing process, ensuring substrate flatness is maintained from the start.
2Reliability
If the substrate is fixed to the chucking plate, then the substrate is securely held, but the organic material cannot be deposited on the chucked surface
Solution Approach 1:
The substrate surface is divided into two functional zones: a chucked portion that is fixed to the chucking plate for secure holding, and a non-chucked portion that remains exposed for organic material deposition. This segmentation allows simultaneous achievement of reliable fixation and uniform deposition.
Solution Approach 2:
Different regions of the substrate are given different properties: the edge region is chucked for stability, while the central region remains non-chucked to receive uniform organic material deposition. Each region has optimized quality characteristics for its specific function.
3Weight of moving object
If the substrate sags, then the substrate weight is supported by gravity, but the organic material deposition becomes uneven
Solution Approach 1:
The position adjusters and support system provide counterbalancing forces against gravity by raising support points beneath the substrate. This anti-weight action counteracts the gravitational pull on the substrate, maintaining substrate flatness and ensuring uniform organic material deposition.
Solution Approach 2:
The support system performs preliminary flattening of the substrate by adjusting support point positions before the deposition process begins. This preliminary action ensures the substrate is in the correct flat state to receive uniform organic material deposition.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution reduces substrate sagging, decreases defect rates, and lowers production energy by ensuring consistent substrate fixation and uniform material deposition across the substrate surface.
Implementation Method 1
a central portion of the substrate sags due to its own weight
Implementation Method 2
chucking the substrate to the chucking plate by applying a voltage to the chucking plate
Implementation Method 3
evaporating an organic material from a source and depositing the organic material on the substrate
Implementation Method 4
the evaporated organic material is deposited on the substrate
Data Source
AI summary
A substrate support apparatus reduces sagging of a substrate. The substrate support apparatus includes a plurality of position adjusters arranged in parallel and spaced apart with respect to a first direction; and a plurality of supports connected to the plurality of position adjusters and configured to support a substrate, wherein the plurality of supports are spaced apart from each other under the substrate and are configured to support the substrate, and wherein the plurality of supports are configured to be raised by the plurality of position adjusters.